[Surface Treatment Example] Prevention of Resist Liquid Adhesion with Ultra-Thin Fluorine Coating

Achieve high water and oil repellency and release properties with an ultra-thin film! Fluorine coating with a thickness of less than 100 nanometers, 'Nano Process TC-10S' *Case studies and materials available.

We will introduce a case where the ultra-thin film fluorine coating "Nano Process TC-10S" achieved liquid drainage of the resist and improved product defects. ■Challenge Points - When applying resist liquid to a film-like substrate, the resist liquid adheres to the suction jig, causing the jig's resist liquid to stick to the next transport substrate. - Adhesion of resist liquid to the substrate causes product defects. - To prevent resist adhesion, the frequency of jig cleaning has increased. - With Teflon coating, the surface irregularities are transferred as patterns onto thin substrates, leading to product defects. ■Solution Points - The thin film fluorine coating with a thickness of less than 1μm does not transfer surface irregularities to the substrate. - The release properties of the resist liquid are good, reducing the risk of liquid adhesion to the substrate. - Reduction in cleaning time for suction jigs. - Decrease in product defects. ■Features of TC-10S - It maintains optical properties with almost no dimensional changes. - It enables processing in fields that require "precision parts" and "high dimensional and surface accuracy," which were difficult to process with previous fluororesin coatings. *For details on the case and surface treatment, please refer to the PDF document or feel free to contact us.

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