High Vacuum Heating Micro Prober 'HMP-100' [Supports up to 500℃]

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last updated：Dec 09, 2024

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High vacuum specification heating micro-prober! The heating temperature can reach up to 500°C, and it supports sample heating with a 10mm shape!

The "HMP-100" is a high vacuum heating micro-prober that can be used at <10^-4 Pa due to its exhaust system. It supports heating temperatures up to 500°C and is compatible with 10mm shaped samples. By adopting a TRIAX connector, it enables electrical measurements below 1 pA. 【Features】 ■ High vacuum specification Usable at <10^-4 Pa due to the exhaust system ■ Heating temperature Supports up to 500°C Compatible with heating 10mm shaped samples ■ Low current measurement Enables electrical measurements below 1 pA by adopting a TRIAX connector *For more details, please refer to the PDF document or feel free to contact us.

Related Link - http://hybridge.co.jp/

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basic information

【Specifications (Excerpt)】 <Sample Evaluation Chamber> ■ Vacuum Chamber: φ114×h84mm SUS304 / Inner surface #400 / Outer surface #400 + Electrolytic Polishing ■ Flange: Conflat Standard ■ Baking: Up to 150℃ <Measurement Section> ■ Number of Probes: 4-probe / Tungsten needles ■ Minimum Measurable Current: Below 1pA (at room temperature) ■ Distance Between Opposing Probes: 417mm <Heating Mechanism> ■ Heating Temperature: Up to 500℃ ■ Heating Mechanism Control: External Control Type PID Controller with DC Power Supply ■ Temperature Sensor: K-type Thermocouple <Main Unit> ■ Equipment Frame ・ Base Plate with Rubber Feet: 310×310×25mm (including rubber feet) ・ Frame for Probing Stage: Aluminum Frame Structure ■ Main Exhaust Valve: ICF70 Manual Angle Valve + ICF70/NW25 Conversion Nipple *For more details, please refer to the PDF document or feel free to contact us.