Measures taken with the air servo active vibration isolation system! A good vibration environment has been established across all frequency ranges.
We would like to introduce a case study on active vibration isolation measures for liquid crystal substrate inspection equipment. During the installation of a large liquid crystal substrate inspection device (length measuring machine), a preliminary survey of the vibration environment of the installation floor revealed that it exceeded the allowable limits. This length measuring machine observes the line width of patterns optically and is sensitive to vibration environments, so we implemented measures using an air servo active vibration isolation device. After the active vibration isolation measures were taken, we cleared the vibration allowable limits for the device and were able to establish a good vibration environment across all frequency ranges. [Case Overview] ■ Issue: A preliminary survey of the vibration environment of the installation floor for the large liquid crystal substrate inspection device (length measuring machine) revealed that it exceeded the allowable limits. ■ Measures: Installation of an air servo active vibration isolation device. ■ Effect: Cleared the vibration allowable limits for the device and established a good vibration environment across all frequency ranges. *For more details, please refer to the PDF document or feel free to contact us.
Inquire About This Product
basic information
For more details, please refer to the PDF document or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
For more details, please refer to the PDF document or feel free to contact us.
catalog（1）
Download All Catalogs
Company information
By controlling vibrations, we can create a comfortable, precise, and safe environment. Our patented equipment is a pioneering company that solves vibration problems. We provide vibration control products tailored to various solutions and applications, ranging from seismic isolation and damping products to micro-vibration control in the nanotechnology industry, as well as environmental measurement, structural analysis, and response prediction (including seismic isolation and resistance products, vibration isolation devices, damping devices, and vibration reduction devices).