6-degree-of-freedom active vibration isolation system

If you choose based on vibration isolation performance and stability, the air pressure controlled active vibration isolation system.

The MAPS series active vibration isolation system from Meiritsu Seiki is a unit type that incorporates pneumatic actuators for vertical and horizontal use within a compact design. By using four units, it demonstrates excellent vibration isolation, damping, and positioning performance against all degrees of freedom of vibration. −− Features −− ● Supports all degrees of freedom of vibration even in a compact size ● Capable of isolating vibrations from equipment over 10 tons with standard MAPS ● Does not shake even when mounted with operating devices such as stages ● Cuts vibrations in frequency ranges that are difficult to manage with passive isolation ● MAPS excels in positioning accuracy and leveling precision

Anti-vibration, earthquake-proof, vibration-isolating devices