Achieving slim design with the same performance as conventional products! Pneumatic active vibration isolation unit.
The active vibration isolation unit "VAAV-H" is equipped with a dedicated ultra-sensitive acceleration sensor for VAAV. It accurately detects extremely small vibrations. Using a unique active vibration isolation algorithm for high-speed computation, it instantly cancels out vibrations with a high-precision, high-output actuator. Additionally, ultra-sensitive acceleration sensors are generously deployed on the floor side, achieving world-class vibration isolation performance through feedforward control. 【Features】 ○ Maintains the same performance as the VAAV-A series while keeping the overall height of the device low. ○ High-precision control of displacement and position in all directions is possible through pneumatic control. ○ Selection of high-flow valves with fast response capable of handling large moving loads is available. ○ Safe and secure design compliant with CE marking (Controller SAC-07). ○ Standard features include stage feedforward functionality and vibration waveform display analysis software. For more details, please contact us or download the catalog.
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basic information
【Specifications】 ○ Control Degrees of Freedom: 3 axes, 6 degrees of freedom ○ Position Accuracy: ±10μm ○ Required Air Source: 0.6MPa or higher (Clean Air) ○ Required Power Supply: AC 100V–240V, 100VA (Single Phase) ○ Control Method: Acceleration feedback, floor feedforward ● For more details, please contact us or download the catalog.
Price information
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Applications/Examples of results
【Applications】 ○ Semiconductor manufacturing and inspection equipment ○ LCD manufacturing and inspection equipment ○ Ultra-precision machine tools ● For more details, please contact us or download the catalog.
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Company information
Showa Science is a company that was established in 1974 with the aim of providing a technology called "vibration isolation," which eliminates vibration disturbances that future ultra-precision instruments may encounter in their installation environments, along with vibration isolation systems utilizing this technology. Since its founding, the company has developed its activities supported by various customers and market needs while keeping pace with the growth of the semiconductor industry both domestically and internationally. Currently, it has expanded its scope to include vibration isolation system business, building vibration control construction business, building equipment vibration control business, ship vibration control construction business, inspection equipment business, and optical and precision equipment business. For vibration isolation tables, anti-vibration tables, air springs, and soundproof boxes, you can trust Showa Science.
![[Example] Active Vibration Isolation Measures for LCD Substrate Inspection Equipment](https://image.mono.ipros.com/public/product/image/875/2000687223/IPROS20629238516810340635.png?w=280&h=280)
