Active Vibration Isolation System "ME Series"

Control in 3D (6 degrees of freedom)! It has vibration isolation performance that is not affected by the mounted object.

The "ME Series" is a vibration control system that continuously monitors the vibrations of the mounted board and controls them by applying counter-phase forces using built-in actuators. The gain adjustment, which is essential for active control, is automatically optimized by Meiritsu Seiki's original control system. By re-evaluating the device structure, we have made it possible to use lightweight mounted objects, such as small SPMs, without compromising vibration isolation performance. 【Features】 ■ 6 degrees of freedom active control ■ Control in three dimensions (6 degrees of freedom) ■ Automatic active adjustment & automatic leveling ■ Vibration isolation performance unaffected by the mounted object ■ Honeycomb optical table compatible (optional) *For more details, please refer to the PDF materials or feel free to contact us.

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