It is effective in microscopes that dislike low-frequency vibrations that cannot be eliminated by passive vibration isolation tables. It can be used with just a small compressor and power supply.
The Linear Active Vibration Isolation Unit "VAAV-S" uses a unique active vibration isolation algorithm for high-speed calculations, and with a non-air-based ultra-fast response linear actuator and ultra-sensitive velocity sensors, it instantly cancels out vibrations. Since it only uses air springs for load support, it can provide world-class vibration isolation performance through floor feed-forward control using ultra-sensitive velocity sensors that can be deployed on the floor side with just a small compressor and power supply. 【Features】 ○ Excellent responsiveness ○ Low air source requirement ○ High cost performance For more details, please contact us or download the catalog.
Inquire About This Product
basic information
【Specifications】 ○ Control Degrees of Freedom: 3 axes, 6 degrees of freedom ○ Position Accuracy: ±1000μm ○ Required Air Source: 0.5MPa or higher, consumption flow rate equivalent to passive ○ Required Power Supply: AC 100V–240V (50/60Hz), 200W ○ Control Method: Speed feedback, floor feedforward ○ Maximum Thrust: Horizontal: 20N, Vertical: 40N Note: When used as 4 units per device ○ Generated Magnetic Field: Below 0.04μT Note: AC magnetic field at a position 150mm away from the unit ● For more details, please contact us or download the catalog.
Price information
Please contact us.
Delivery Time
※Please contact us.
Applications/Examples of results
【Applications】 ○ Electron microscope ○ Scanning tunneling microscope, atomic force microscope, and optical measurement devices ○ Vibration isolation measures for installation floors with significant low-frequency vibrations ● For more details, please contact us or download the catalog.
catalog（1）
Download All Catalogs
Company information
Showa Science is a company that was established in 1974 with the aim of providing a technology called "vibration isolation," which eliminates vibration disturbances that future ultra-precision instruments may encounter in their installation environments, along with vibration isolation systems utilizing this technology. Since its founding, the company has developed its activities supported by various customers and market needs while keeping pace with the growth of the semiconductor industry both domestically and internationally. Currently, it has expanded its scope to include vibration isolation system business, building vibration control construction business, building equipment vibration control business, ship vibration control construction business, inspection equipment business, and optical and precision equipment business. For vibration isolation tables, anti-vibration tables, air springs, and soundproof boxes, you can trust Showa Science.
![[Example] Active Vibration Isolation Measures for LCD Substrate Inspection Equipment](https://image.mono.ipros.com/public/product/image/875/2000687223/IPROS20629238516810340635.png?w=280&h=280)
