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  1. Home
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  3. Manufacturing and processing machinery
  4. Semiconductor Manufacturing Equipment
  5. Evaporation Equipment
  6. Mobile Combi Laser MBE Device "MC-LMBE"

Mobile Combi Laser MBE Device "MC-LMBE"

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last updated:Feb 18, 2022

パスカル
パスカル
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Standard equipped with scanning RHEED! Two motor-driven combinatorial masks installed.

The "MC-LMBE" is a compact ultra-high vacuum laser MBE (PLD) system with high operability. It is equipped with a semiconductor laser substrate heating unit that can heat up to 1200°C. It also has two motor-driven combinatorial masks. Additionally, the load-lock chamber unit allows for easy replacement of targets and substrates in a vacuum. 【Features】 ■ High operability and compact design ■ Achievable vacuum level: 6.7×10^-7Pa (below 5×10^-9Torr) ■ Two motor-driven combinatorial masks ■ Semiconductor laser substrate heating unit capable of heating up to 1200°C ■ Six types of targets available *For more details, please refer to the PDF document or feel free to contact us.

    Evaporation Equipment
2022-02-18_10h43_22.png

Mobile Combi Laser MBE Device "MC-LMBE"

2022-02-18_10h43_22.png
2022-02-18_10h43_22.png
  • Related Link - http://www.pascal-co-ltd.co.jp/product/deppld_mcpl…

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【Other Features】 ■ Standard equipped with scanning RHEED ■ Easy exchange of targets and substrates in a vacuum using the load lock chamber unit ■ Fully computer-controlled *For more details, please refer to the PDF document or feel free to contact us.

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Mobile Combination Laser MBE Device "MC-LMBE"

Mobile Combination Laser MBE Device "MC-LMBE"

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パスカル

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At Pascal Corporation, we handle a variety of experimental equipment useful for research and development, including vacuum devices such as PLD/laser MBE systems, surface analysis equipment like atomic scattering spectrometers, cryogenic refrigeration systems, and Agilent (Varian) vacuum pumps. With a global perspective in vacuum equipment and scientific instruments, we constantly look ahead of the times, anticipate new technologies and product needs, and continue to provide products that are beneficial to our users.

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