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  1. Home
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  3. Manufacturing and processing machinery
  4. Semiconductor Manufacturing Equipment
  5. Evaporation Equipment
  6. Compact Laser MBE Device "PAC-LMBE"

Compact Laser MBE Device "PAC-LMBE"

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last updated:Feb 18, 2022

パスカル
パスカル
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Easy-to-handle design allows for easy control of various film formation conditions! Six types of targets can be used.

The "PAC-LMBE" is a highly scalable ultra-high vacuum laser MBE (PLD) system. As a substrate heating unit, you can choose between infrared lamp heating and semiconductor laser heating. Six types of targets can be used. Additionally, the load-lock chamber unit allows for easy exchange of targets and substrates in a vacuum. 【Features】 ■ Highly scalable ■ Achievable vacuum level: below 6.7×10^-7Pa (5×10^-9Torr) ■ Six types of targets available ■ Easy exchange of targets and substrates in a vacuum with the load-lock chamber unit ■ Optional ports: various components can be mounted *For more details, please refer to the PDF materials or feel free to contact us.

    Evaporation Equipment
2022-02-18_10h48_35.png

Compact Laser MBE Device "PAC-LMBE"

2022-02-18_10h48_35.png
2022-02-18_10h48_35.png
  • Related Link - http://www.pascal-co-ltd.co.jp/product/deppld_pacp…

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【Other Features】 ■ As a substrate heating unit, either infrared lamp heating or semiconductor laser heating can be selected. ■ Either complete automatic control by computer or electro-manual control via a controller, or both can be selected. *For more details, please refer to the PDF materials or feel free to contact us.

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Compact Laser MBE Device "PAC-LMBE"

Compact Laser MBE Device "PAC-LMBE"

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パスカル

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Industrial Machinery

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At Pascal Corporation, we handle a variety of experimental equipment useful for research and development, including vacuum devices such as PLD/laser MBE systems, surface analysis equipment like atomic scattering spectrometers, cryogenic refrigeration systems, and Agilent (Varian) vacuum pumps. With a global perspective in vacuum equipment and scientific instruments, we constantly look ahead of the times, anticipate new technologies and product needs, and continue to provide products that are beneficial to our users.

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