A surface heater with excellent uniform heating properties!
The "HFC-Ox" is a gas separation type surface heating heater that uses C/C composites (carbon-carbon composites) completely covered with quartz glass, capable of heating up to 1,000°C in an oxidizing atmosphere. It is mainly suitable for integration into thin film devices (such as CVD/sputtering) and semiconductor manufacturing equipment (such as substrate heating/flash annealing). 【Features】 ■ Capable of heating up to 1,000°C in air or oxidizing atmosphere ■ Designed with chemically stable quartz glass, making it less susceptible to environmental influences ■ Extremely low contamination generation, allowing for clean operation ■ The C/C composite material used for the heater has a small heat capacity, is resistant to vibration, shock, and thermal shock, and allows for rapid heating and cooling ■ Compact design that does not take up much space *For more details, please download the PDF or feel free to contact us.
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basic information
【Specifications】 ■ Maximum operating temperature: 1,000℃ ■ Operating atmosphere: Atmosphere/Vacuum/Gas ■ Sample surface uniformity: 1,000℃ +5℃ (Note: Sample surface uniformity may vary depending on the environment, so it is not an absolute value.) ■ Cooling method: Water-cooled *For more details, please download the PDF or feel free to contact us.
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【Applications】 ■ Integration into thin film devices (CVD/sputtering, etc.) ■ Integration into semiconductor manufacturing equipment (substrate heating/flash annealing, etc.) ■ Usable for various other purposes *For more details, please download the PDF or feel free to contact us.
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Our company specializes in the manufacturing of heaters used in ultra-high temperature ranges exceeding 800°C to 2,500°C. We are utilized in various fields, from research and development of new materials, manufacturing of lenses and semiconductors, to extreme environments such as nuclear and aerospace sectors. Moving forward, we will continue to leverage our expertise to propose products that meet our customers' needs.