Surface Heating CC Heater

For incorporation into thin film devices and semiconductor manufacturing equipment! Surface heaters capable of heating to over 1200°C.

The "Surface Heating CC Heater" is a thin and compact product that uses C/C composite (carbon-carbon composite) as its heat source. By using C/C composite, it is possible to achieve high temperatures that are difficult to reach with plate heaters using sheath heaters. Additionally, since heating is performed on a susceptor installed above the heater, uniform heating can be achieved, allowing for temperature increases of up to 400°C in the atmosphere and over 1200°C in a vacuum or inert gas environment. 【Features】 ■ Uniform heating with a susceptor ■ Realization of high-temperature heating ■ Advantages of using C/C composite material *For more details, please refer to the PDF document or feel free to contact us.

Ceramic Heater