Dead volume reduction! Metal seal mass flow controller with a maximum flow rate of 1 SCCM to 20 SLM.
The "MODEL 5100 SERIES" is a metal-sealed mass flow controller that accommodates very low flow rates starting from F.S. 1 SCCM when converted to N2. It reduces dead volume with a diaphragm seat valve. The applicable fluids include N2, Air, H2, He, Ar, O2, CO2, etc., with a maximum flow rate ranging from 1 SCCM to 20 SLM. 【Features】 ■ Applicable fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 1 SCCM to 20 SLM ■ Accuracy: ±1% F.S. ■ Supports very low flow rates (from F.S. 1 SCCM when converted to N2) *For more details, please refer to the PDF document or feel free to contact us.
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【Standard Specifications (Excerpt)】 ■ Sensor Type: Thermal Wire Sensor ■ Valve Type: Proportional Solenoid Valve (Closed when not energized) ■ Control Range: 2–100% F.S. ■ Allowable Ambient Temperature: 0–50℃ ■ Gas Contact Material: SUS316L, Ni, PTFE, Au ■ Weight: Approximately 1000g *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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The environment surrounding the Earth consists of gases and liquids. The technology to measure, control, and generate these is essential for the development of society and industry, and can be considered a foundation that supports the next generation of manufacturing. For over 70 years, Kofloc has been exploring measurement and control technology primarily for small fluid volumes under the motto "Science of Fluids." We have built trust across diverse fields and now boast a top domestic market share in various sectors. Kofloc continues to challenge itself with new technologies that create a future for people and the Earth, striving to realize a rich life for everyone.