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  3. Measurement and Analysis
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  5. Flow Meter
  6. MODEL 3660 SERIES

MODEL 3660 SERIES

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last updated:Jun 30, 2025

コフロック 本社(京田辺工場)、八幡工場、東京、大阪、名古屋、福岡
コフロック 本社(京田辺工場)、八幡工場、東京、大阪、名古屋、福岡
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Standard mass flow controller compatible with a wide flow range for N2, Air, H2, He, and others!

We would like to introduce our standard mass flow controller, the 'MODEL 3660 SERIES'. It supports a wide flow range from F.S. 10 SCCM to F.S. 100 SLM, converted to N2. The applicable fluids include N2, Air, H2, He, Ar, O2, CO2, etc., with a maximum flow rate ranging from 10 SCCM to 100 SLM. 【Features】 ■ Applicable fluids: Gases such as N2, Air, H2, He, Ar, O2, CO2, etc. ■ Maximum flow rate: Gases from 10 SCCM to 100 SLM ■ Accuracy: ±1 to 1.5% F.S. ■ Supports a wide flow range (from F.S. 10 SCCM to F.S. 100 SLM, converted to N2) *For more details, please refer to the PDF document or feel free to contact us.

    Flow Meter
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MODEL 3660 SERIES

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  • Related Link - https://www.kofloc.co.jp/product/product-1149

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【Standard Specifications (Excerpt)】 ■ Valve Type: Proportional Solenoid Valve (Closed when not energized) ■ Repeatability: ±0.5% F.S ■ Maximum Inlet Pressure: 500kPa (G) ■ Allowable Ambient Temperature: 5 to 45℃ ■ Weight  ・3660: Approximately 1000g  ・3665: Approximately 1500g *For more details, please refer to the PDF document or feel free to contact us.

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Standard Mass Flow Controller "MODEL 3660 SERIES"

Standard Mass Flow Controller "MODEL 3660 SERIES"

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コフロック

コフロック 本社(京田辺工場)、八幡工場、東京、大阪、名古屋、福岡

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The environment surrounding the Earth consists of gases and liquids. The technology to measure, control, and generate these is essential for the development of society and industry, and can be considered a foundation that supports the next generation of manufacturing. For over 70 years, Kofloc has been exploring measurement and control technology primarily for small fluid volumes under the motto "Science of Fluids." We have built trust across diverse fields and now boast a top domestic market share in various sectors. Kofloc continues to challenge itself with new technologies that create a future for people and the Earth, striving to realize a rich life for everyone.

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