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  1. Home
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  3. Measurement and Analysis
  4. Other measuring instruments
  5. Flow Meter
  6. Mass flow products "SLA5800/SLAMF" selected for the entire equipment.

Mass flow products "SLA5800/SLAMF" selected for the entire equipment.

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Brooks Instrument SLA5800 Series / SLAMF Series

last updated:Jul 13, 2026

ITWジャパン
ITWジャパン
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Not just looking at functionality. Mass flow products selected by considering the entire equipment. From standard environments to IP66 and explosion-proof certification. Two series tailored to equipment conditions.

In research, demonstration, and production facilities for hydrogen, fuel cells, water electrolysis, CCUS, synthetic fuels, etc., it is important to select not only the standalone function of the mass flow controller but also to consider gas type, normal flow rate, inlet and outlet pressure, gas contact materials, communication, installation environment, calibration, and necessary certifications. The Brooks Instrument SLA5800/SLAMF series are thermal mass flow controllers/meters that can be selected according to the actual equipment configuration and operating conditions. The SLA5800 is a standard series for general applications that supports research and development equipment, analytical instruments, demonstration facilities, and production equipment. The SLAMF is a robust series based on the measurement and control technology of the SLA family, featuring an IP66 enclosure and specifications for hazardous locations. It is designed for applications that require consideration of installation conditions, such as equipment handling dust, moisture, cleaning environments, and flammable gases. In product selection, it is essential to check not only the flow range but also gas type, inlet and outlet pressure, required differential pressure, valve specifications, piping connections, sealing materials, communication methods, and installation environment. The concept of the SLA5800/SLAMF series is to choose specifications that allow for stable operation as part of the equipment, not just comparing the standalone functions of the products.

    Flow MeterFlow ControlFlow Sensor
SLA&SLAMF.png

Mass flow products "SLA5800/SLAMF" selected for the entire equipment.

SLA&SLAMF.png
SLA&SLAMF.png
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basic information

**SLA5800 Series** For standard environments and embedded devices This is a general-purpose series that supports a wide range of devices and equipment, including research and development equipment, analytical instruments, evaluation devices, demonstration facilities, and production equipment. **SLAMF Series** IP66 and explosion-proof certification compliant This robust series is designed for applications that require consideration of installation environments such as dust, humidity, cleaning environments, and hazardous locations. ■ Measurement target: Gas ■ Measurement principle: Thermal type ■ Full-scale flow range available for production N2 equivalent 0.003 to 2500 SLM *SLAMF64 is 9000 SLM ■ Main communication methods Analog / RS-485 PROFIBUS DeviceNet EtherCAT EtherNet/IP PROFINET ■ Main gas contact materials 316 / 316L stainless steel High-alloy stainless steel Various elastomers, etc. ■ Calibration Traceability to international standards ISO/IEC 17025 calibration specifications available ■ Installation environment and certification SLAMF: IP66 Certification specifications for hazardous locations available Division 2 / Zone 2 compliant for applicable configurations *The range of certification compliance varies by model and configuration.

Price information

It varies depending on specifications such as flow range, pressure, connection, communication, authentication, calibration, and documentation. Please check the usage conditions, and we will provide a separate estimate.

Delivery Time

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※It varies depending on the type, configuration, certification, calibration options, etc. Please contact us for more details.

Applications/Examples of results

【Examples of Applications Related to Smart Energy】 ■ Hydrogen production and water electrolysis equipment ■ Fuel cell cell/stack evaluation ■ Control of hydrogen, oxygen, nitrogen, and air supply ■ CCUS and CO2 separation/utilization evaluation ■ Methanation, synthetic fuels, and catalytic reactions ■ Gas separation membranes and adsorbent evaluation ■ Secondary battery materials, MLCC, and fine ceramics ■ Atmosphere gas control for heat treatment furnaces and sintering furnaces ■ Mixed gas and gas supply equipment ■ Analytical devices and calibration gas supply ■ Scaling up from research equipment to demonstration and production facilities We will propose applicable models and specifications after confirming applicability based on the application and usage conditions.

catalog(12)

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Smart mass flow meter (with controller) explosion-proof structure electrical machinery equipment type certification approval.

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Thermal Mass Flow Controller / Mass Flow Meter "SLA5800 Series"

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[Instruction Manual] Thermal Mass Flow 'SLA5800 Series'

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Gas flow control supports the development of decarbonization and environmental technologies (Brooks Instrument's solutions).

Gas flow control supports the development of decarbonization and environmental technologies (Brooks Instrument's solutions).

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SLA series (supports CCUS, exhaust gas treatment, hydrogen utilization, and thermal treatment processes)

SLA series (supports CCUS, exhaust gas treatment, hydrogen utilization, and thermal treatment processes)

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Comprehensive Catalog Product Guide 'flow-pressure-vapor-guide'

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Service & Support

Service & Support

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Stabilizing the ceramics process from gas flow | MLCC and fine ceramics

Stabilizing the ceramics process from gas flow | MLCC and fine ceramics

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Company information

ITWジャパン

ITWジャパン

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Our company provides products used in various fields, including heavy industry, oil and gas refining, research in chemistry and petrochemicals, production of pharmaceuticals and biopharmaceuticals, as well as manufacturing equipment for solar cells, LEDs, thin films, optical fibers, and semiconductors. By contributing to the environmental settings that enable process control and accurate measurements, we enhance the precision of our customers' processes, continuously supporting them to maintain their competitiveness while striving for mutual improvement, leading to the development and growth of their businesses. Please feel free to consult us if you have any requests.

Product/Service List (61)

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