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  1. Home
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  3. Manufacturing and processing machinery
  4. Semiconductor Manufacturing Equipment
  5. Sputtering Equipment
  6. Basic Knowledge of Sputtering

Basic Knowledge of Sputtering

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last updated:Feb 15, 2023

デクセリアルズ
デクセリアルズ
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Free technical data available! Enables precise and hard film formation! Applicable to the production of automotive mirrors and more.

There are several methods for forming thin films on the surfaces of substrates such as film and glass, including coating, printing, plating, and vapor deposition. However, the technique used to accurately form nano-level thin films composed of metals or ceramics is called "sputtering." In actual sputtering, the role of the "stone" is played by inert gases such as argon (Ar) that are filled in a vacuum container (vacuum chamber). In sputtering, argon gas is introduced into the vacuum, and a negative voltage is applied to the target material, generating a glow discharge, which is also used in fluorescent lights. The positively charged, plasma-formed argon ions then collide with the surface of the target material at ultra-high speeds (about 3.2 km per second), violently ejecting particles (atoms and molecules) from the target material. The ejected particles adhere vigorously to the surface of the substrate, and as they accumulate, a thin film is formed. This is the principle of sputtering. *For more detailed information, please refer to the related links. For further inquiries, feel free to contact us.*

    Sputtering Equipment
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Basic Knowledge of Sputtering

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"Sputtering Technology that Meets Diverse Needs" The strength of Dexerials' sputtering technology lies in its ability to "mix a wide variety of elements to create suitable target materials tailored to specific purposes." To date, we have produced approximately 200 types of prototypes and about 30 types of mass-produced targets. The elements available for use in our sputtering targets amount to 42 different types. While the direct product in sputtering is the "material of the target," our expertise lies in the technology of appropriately mixing multiple metals and ceramic materials such as metal oxides in suitable ratios for sputtering. We will continue to provide thin film formation technology based on this expertise, tailored to our customers' requests. *For more detailed information, please refer to the related links. For further inquiries, feel free to contact us.*

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[Technical Information] New Functions for Materials with Thin Films Created by Sputtering: Dexerials' Precise Thin Film Formation Technology

[Technical Information] New Functions for Materials with Thin Films Created by Sputtering: Dexerials' Precise Thin Film Formation Technology

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デクセリアルズ

デクセリアルズ

Electronic Components and Semiconductors

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Dexerials Corporation has business offices and sales bases not only in Japan but also in Asia, including China, as well as in Europe and the United States. We continue to provide products with new value that meet customer needs tailored to each market. By adding new technologies to our existing products, we aim to maintain and strengthen our business. Moving forward, we will boldly challenge the automotive and life sciences sectors, steadily nurturing and expanding new businesses, while advancing the development of technologies that will pave the way for the future. As a company that creates new value that is not found anywhere else, we strive to maximize customer value and continue to challenge ourselves to become a trusted partner for our customers and society.

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