For those troubled by residual hydrogen!
This is a NEG pump with a small nipple NEG cartridge inserted into a vacuum container made of 0.2% BeCu alloy. Activation is performed using a spiral tantalum heater placed in the center. The low emissivity and high thermal conductivity of the copper alloy allow for a reduction in gas (hydrogen) release from the pump itself to as little as 1/10 of that of conventional NEG pumps. The power required during activation at 450°C is 22W for the ICF70 type and 50W for the 114 type, making it energy-efficient. Our company refers to the low gas release technology product using 0.2% BeCu alloy as a "magic product," and thus we named this series of NEG pumps the "Magic NEG Pump." The greatest appeal of the Magic NEG Pump is that we can offer it at an ultra-low price for both the CF70 type and the 114 type. Since it is priced as a consumable, it can be tried by customers who are using NEG for the first time.
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basic information
**Features** - Low gas emission NEG pump using NEG - NEG arranged on the wall of the pump casing - Ultra-low gas emission pump casing made of 0.2% BeCu alloy - Effective pumping speed extended to 10^-10 Pa range - High pumping speed for CO (almost equivalent to H2) - Energy-saving activation, operation → no vibration, no charged particles, no power - Compatible with SUS ICF070 & 114 flanges - Installation direction is flexible
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Applications/Examples of results
■For those who want to extend their pumping capability to the ultra-high vacuum (XHV) range ■For those struggling with the removal of residual hydrogen gas ■As an auxiliary pump for turbo molecular pumps (open systems) and small ion pumps (sealed systems). ■For those considering reducing evacuation time (it is possible to generate XHV in the 10^-10 Pa range within 24 hours of starting evacuation from atmospheric pressure).
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Company information
At Tokyo Electron Limited, we have developed a variety of vacuum gauges and control equipment that boast precision, reliability, and durability through our expertise in electronics and precision machinery. The concept of "vacuum" is a foundational technology for our lives and industries, impacting fields ranging from the IT industry to electronics, food and healthcare, as well as the development of new materials and the manufacturing of essential goods. Therefore, our business is centered on accurately and flexibly responding to the diverse demands of our clients across various fields. For the betterment of modern industry, tomorrow, and the future, we continue our activities today with the hope that our technology and products related to "vacuum" will become a "true sky" that spreads over people's happiness, just like a clear blue sky.