Direct drive motor adopted for the swivel axis for wafers up to 300mm! A vacuum wafer transfer robot capable of high-precision operation.
■Double-arm type vacuum wafer transfer robot with standard Z-axis ■Adopts direct drive motor for the θ-axis, contributing to improved throughput by transporting wafers with low vibration ■Compatible with high-temperature process equipment such as CVD and annealing devices ■Supports heavy object transport with a load capacity of 2kg ■Equipped with wafer center position deviation correction function *For more details, please feel free to contact us.
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【Specifications】 ■Operating Range ・X1, X2-axis: 670mm ・θ-axis: 330° ・Z-axis: 50mm ■Maximum Operating Speed ・X1, X2-axis: 120°/sec ・θ-axis: 100°/sec ・Z-axis: 25mm/sec ■Payload Weight: 2kg (Including E/E, E/E-base, Wafer) ■Body Weight: 85kg ■Installation Environment ・Temperature: 15-40℃ (Atmosphere side) 0-80℃ (Vacuum Seal Unit) ・Humidity: 20-70%, No condensation ・Pressure: Atmospheric pressure ～ 10-6Pa *For more details, please feel free to contact us.
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Since its establishment in 1919, Daihen has been engaged in the development of products that society needs, such as transformers, welding machines, industrial robots, and high-frequency power supplies for semiconductor manufacturing equipment, contributing to the advancement of power infrastructure that forms the foundation of daily life and the evolution and development of global manufacturing. Now, as a new step, we aim to become a "research and development-oriented company" that directly addresses social issues. Through the development of energy management systems that contribute to the expansion of renewable energy use, charging infrastructure essential for the spread of EVs, and new bonding processes that aid in vehicle weight reduction, we are committed to realizing a decarbonized society with our "Green Solutions." Additionally, we aim to contribute to addressing "labor shortages" and the "diversification of workers and work styles" by providing optimal solutions tailored to the specific circumstances of our manufacturing customers through "Tailored Solutions," which are essentially "custom-made" robotic systems. By focusing on these areas and strengthening our development efforts, we will continue to introduce products with unique value to the market, striving to bring even more joy to our customers and serve society effectively.