High current density ion beam type ion gun
981-2043: 3 keV ion gun set 981-2043-1: Gas introduction type 3 keV ion gun set
EUROVAC's VARIAN type low-cost 3keV ion gun
EUROVAC, a company based in Sweden, was established over 30 years ago and is operated by physicists from the PHI division of PerkinElmer in Munich. We have established a system to support our customers in solving practical, technical, and fundamental research challenges. In 1998, EUROVAC acquired the Surface Science division of Varian (USA/Palo Alto) and transferred the manufacturing of ion guns, electron guns, LEED, RHEED, and CMA to Stockholm, Sweden, providing reliable and excellent equipment at low prices, along with products, spare parts, and service support. 【Features】 ■ High current density ion beam: Ideal for sputter cleaning of sample surfaces and rapid, accurate depth profiling of thin film structures. ■ Switchable dual filament: In the event of filament burnout during the vacuum cycle, the switchable dual filament structure allows for continuous operation without hindering the progress of work.
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basic information
【Specifications】 ■ Ion beam energy: 0–3 keV ■ Ion current density: >300 μA/cm² ■ High sputtering rate: 200 Å/min ■ Beam diameter: 2.5 mm ■ Remote control function: On/Off for beam voltage ■ Ion beam scanning function: ■ DC deflection function: ■ Automatic gas outlet function: ■ Mounting flange: ICF70 ■ Allowable heating temperature: 250℃
Price range
Delivery Time
※2.0 - 2.5 weeks
Applications/Examples of results
To generate a high current density ion beam, it is optimal for sputter cleaning of the sample surface and rapid, accurate depth profiling of thin film structures.
Company information
We have built trust and a track record in the export and import, design, manufacturing, and sales of scientific and chemical instruments, electronic devices, analytical instruments, ultra-high vacuum equipment, and related components. Moving forward, we will focus on introducing and selling new products that meet the needs of our customers and the market, and we will strive to provide cutting-edge information from around the world to be of service to everyone.
