For incorporation into thin film devices and semiconductor manufacturing equipment! Surface heaters capable of heating to over 1200°C.
The "Surface Heating CC Heater" is a thin and compact product that uses C/C composite (carbon-carbon composite) as its heat source. By using C/C composite, it is possible to achieve high temperatures that are difficult to reach with plate heaters using sheath heaters. Additionally, since heating is performed on a susceptor installed above the heater, uniform heating can be achieved, allowing for temperature increases of up to 400°C in the atmosphere and over 1200°C in a vacuum or inert gas environment. 【Features】 ■ Uniform heating with a susceptor ■ Realization of high-temperature heating ■ Advantages of using C/C composite material *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Specifications】 ■ Maximum operating temperature: 1200℃～ *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Applications】 ■ Integration into thin film devices (CVD/Sputtering) ■ Integration into semiconductor manufacturing equipment (substrate heating/flash annealing, etc.) ■ Versatile use in other environments where carbon materials can be utilized *For more details, please refer to the PDF document or feel free to contact us.
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Company information
Our company specializes in the manufacturing of heaters used in ultra-high temperature ranges exceeding 800°C to 2,500°C. We are utilized in various fields, from research and development of new materials, manufacturing of lenses and semiconductors, to extreme environments such as nuclear and aerospace sectors. Moving forward, we will continue to leverage our expertise to propose products that meet our customers' needs.