It is a tabletop-sized high vacuum deposition device. Carbon deposition, gold deposition, aluminum deposition, and chromium deposition can be easily achieved.
★ VE-2013 is a simplified vacuum deposition device that inherits the concept of VE-2030 (our product). ★ A compact body with an integrated TMP has been realized. It is a desktop type, so it does not take up installation space (RP is floor-mounted). ★ By using a small TMP and RP exhaust system, we provide a high vacuum deposition device at a low price. ★ Exhaust operations are fully automated and controlled by simply turning the touch panel switch ON/OFF. ★ The use of a tungsten basket allows for deposition of materials such as gold, aluminum, chromium, and silver. ★ For carbon deposition, a clamp deposition gun type is used to deposit dedicated carbon with a diameter of 0.5mm. (φ5mm carbon rods cannot be used.)
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basic information
1. Heater electrodes: 1 pair (2 pair type is optional.) 2. Metal for deposition: Gold, aluminum, chromium, silver, carbon, others 3. Sample stage: Diameter 72mm 4. Distance between deposition source and sample: 0mm to 140mm 5. Chamber size: Inner diameter 160mm x depth 235mm 6. Voltage/current between electrodes: AC 15V, 0 to 30A touch panel display 7. Exhaust system: TMP67 ℓ/sec + RP 50ℓ/min 8. Vacuum measurement: Touch panel display full-range vacuum gauge 9. Achievable vacuum: Below 5×10-4 Pa 10. Safety measures: Circuit protectors by system, automatically blocks overload 11. Equipment size: W428 x D430 x H550 (mm) 38Kg 12. Power supply: Single-phase AC 100 V, 15A, using a 3-core plug with ground wire
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Price range
P5
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Company information
We manufacture sputtering devices, deposition devices, plasma irradiation devices, CVD devices, and vacuum components. We offer a lineup of pre-treatment devices for electron microscope sample preparation and small vacuum devices for research and development institutions. We believe it is our company's mission to quickly and affordably supply the necessary equipment development for those active in cutting-edge technology research and development, and to support development by making incremental improvements and modifications during the experimental process. We are involved in the development, commercialization, sales, and service of experimental instruments and devices necessary for new technology development in the fields of semiconductors, biotechnology, environment, and nanotechnology, as well as devices related to electron microscope sample preparation as cutting-edge analytical tools for new technology development.