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  4. Semiconductor Manufacturing Equipment
  5. Evaporation Equipment
  6. High Vacuum Deposition Device "KW-030D"

High Vacuum Deposition Device "KW-030D"

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last updated:May 26, 2020

片桐エンジニアリング
片桐エンジニアリング
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Equipped with a crystal vibration-type film thickness monitor! Compact design enables clean film formation.

The "KW-030D" is a high vacuum deposition device designed for small-scale production and experimental use in research institutions, featuring a compact design that allows beginners to operate it easily. By incorporating a turbo molecular pump, it enables film deposition in high vacuum conditions. Additionally, it is equipped with a substrate tilting mechanism, allowing for angled deposition by adjusting the rotation angles in two axes. 【Features】 ■ Easy operation for beginners ■ Equipped with a turbo molecular pump ■ Substrate tilting mechanism included ■ Three resistance heating evaporation sources, with optional EB heating support ■ Quartz crystal thickness monitor included *For more details, please refer to the PDF document or feel free to contact us.

    Evaporation EquipmentAnalytical Equipment and Devices
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High Vacuum Deposition Device "KW-030D"

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  • Related Link - http://www.kk-eng.co.jp/product/jyoutyaku.htm

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【Specifications (Excerpt)】 ■Achieved Pressure: 4×10^-5 Pa ■Exhaust Time: Within 10 minutes to 5×10^-4 Pa ■Bell Jar: SUS304 Φ507×H422 ■Evaporation Source: 3 pairs of resistance heating evaporation sources, 2kW 3-gun EB (optional) ■Exhaust System: TMP 800 L/sec, RP 360 L/min, complete set of vacuum valves, accessories *For more details, please refer to the PDF document or feel free to contact us.

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High Vacuum Deposition Device 'KW-030D'

High Vacuum Deposition Device 'KW-030D'

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片桐エンジニアリング

片桐エンジニアリング

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Since its establishment in 1991, KKE has received your generous support and cooperation, for which we are deeply grateful. Before the founding, I dedicated myself to technical operations. Drawing on what I learned during that time, KKE has grown together with all of you. Particularly, we have focused on "development, design, and manufacturing" in the field of vacuum technology without having standardized products, and we have had the pleasure of collaborating with industry, government, and academia. We have maintained a commitment to thoroughly engage in "development, design, and manufacturing" tailored to the specific requirements of our customers, making progress based on accurate judgments to meet their needs. Aiming to be a development-oriented company capable of responding to cutting-edge science and technology in the 21st century, we strive to contribute to society through "manufacturing" and to achieve happiness together with all of you. We look forward to your continued support for KKE.

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