Tohoku University Technology: Absolute position measurement device and measurement method: T18-501
High resolution and high accuracy absolute position measurement using diffracted light
Optical linear encoder is used as high accuracy displacement sensor for semiconductor manufacturing equipment and various absolute position detection methods have been implemented. However, complex micro-pattern combinations and detection opticsare necessary. For this purpose, an optical single-axis encoder thatuses white light source and diffraction grating with unequal tickspacing is proposed to detect the absolute position based on the spectrum of the analyzer. However, the rotational motion error of thegrating affects the position detection. The present invention is able to provide an optical absolute positionmeasurement device and method with high resolution and accuracyin single or double axis by analyzing the spectrum of a diffractedbunch light. An unequal spaced grating is provided to incident thebunch white light, and the absolute position is detected from the peakwavelengths detected on the optical spectrum of the analyzer.
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The revenue generated from technology transfer is reinvested as new research funding for universities and researchers, and is utilized to create further research outcomes. To ensure the smooth operation of this cycle, known as the "Intellectual Creation Cycle," we will vigorously promote technology transfer. The types of seeds we handle include patents, know-how, databases, and programs. We have established a collaborative framework by signing basic technology transfer agreements with the following universities (as of June 1, 2025): Tohoku University, Hirosaki University, Iwate University, Akita University, Fukushima University, Yamagata University, Tohoku Gakuin University, Iwate Medical University, Fukushima Medical University, Aizu University, Miyagi University, Hokkaido University, Muroran Institute of Technology, and Showa Medical University.
