Supports atmospheric transport of wafers! The main unit weighs approximately 47 kg and the controller weighs about 8 kg.
The "PHT-R-4" is a horizontal multi-joint wafer transport robot designed for use in clean rooms. It is capable of moving in the front and back (X-axis), rotating (θ-axis), moving up and down (Z-axis), and hand rotation (0 to 180 degrees), making it suitable for transporting wafers in the atmosphere. The drive motor is an AC servo motor with absolute encoder specifications for all axes. 【Product Overview (Excerpt)】 ■ Installation Environment: Inside clean rooms (ambient temperature 10 to 35 degrees, humidity below 70% RH) ■ Arm: Single arm (Material: Aluminum, CFRP, Ceramic) ■ Load Capacity: 3 kg (total weight of hand base, hand, and work) *For more details, please refer to the PDF document or feel free to contact us.
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【Standard Specifications (Excerpt)】 ■Transported Object: Up to 300mm wafers (flexibly customizable for other special workpieces, shapes, and materials) ■Wafer Holding Method: Vacuum suction, edge clamp, edge hold ■Machine Structure Type: Horizontal multi-joint type, cylindrical coordinate system ■Control Axes: 4 axes ■Motor Type: AC servo motor, absolute encoder specification ■Weight ・Main Unit Weight: Approximately 47kg ・Controller: Approximately 5kg *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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PHT Corporation is a company engaged in the semiconductor transport system business and semiconductor cleaning equipment business. Features PHT will actively operate globally as a niche top company in the semiconductor industry, specializing in wafer automatic peeling equipment (peeling cleaning machines). PHT has proposed transport and cleaning solutions for compound semiconductors, including next-generation SiC (silicon carbide) and GaN (gallium nitride) materials, utilizing silicon wafer transport and laser processing technology. We are particularly proactive in approaching the power semiconductor market. Our company is creating a comprehensive solution provision system for semiconductor manufacturing equipment aimed at energy conservation (electric vehicles, power control).