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PHT Company Profile
Specialized manufacturers of semiconductor transport devices and semiconductor cleaning devices.
PHT Corporation is a company engaged in the semiconductor transport system business and semiconductor cleaning equipment business. Features PHT will actively operate globally as a niche top company in the semiconductor industry, specializing in wafer automatic peeling equipment (peeling cleaning machines). PHT has proposed transport and cleaning solutions for compound semiconductors, including next-generation SiC (silicon carbide) and GaN (gallium nitride) materials, utilizing silicon wafer transport and laser processing technology. We are particularly proactive in approaching the power semiconductor market. Our company is creating a comprehensive solution provision system for semiconductor manufacturing equipment aimed at energy conservation (electric vehicles, power control).

Business Activities
<Semiconductor Transport System Business> ■Wafer transport robot systems for semiconductors, laser application systems ■Glass substrate transport robot systems for LCDs, laser application systems and development, design, manufacturing, and sales of related equipment <Semiconductor Cleaning Equipment Business> ■Automatic wafer peeling devices ■Automatic wafer cleaning devices ■Post-wire saw cleaning, post-lapping cleaning, alkaline etching cleaning, pre-heat treatment cleaning, post-heat treatment cleaning, post-polishing cleaning, FINAL cleaning, and development, design, manufacturing, and sales of related equipment
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Detailed information
Company name | PHT |
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Contact address | postalcode 115-0045 Tokyo/ Kita-ku/ 2-69-2 AkabaneView on map TEL:03-6751-7153 FAX:03-6761-8935 |
Industry | Industrial Machinery |
