Providing suitable custom equipment tailored to your needs! Design capable of process optimization.
This product is a batch-type automatic cleaning device for silicon wafers that achieves an optimal process with a simple processing structure. The arrangement of parts takes maintenance into consideration. Each unit of the cleaning device is modularized. It supports various processes such as "post-wire saw cleaning," "post-lapping cleaning," and "alkaline etching cleaning." 【Features】 ■ High process performance ■ High throughput ■ Improved maintainability ■ Equipment design ■ Extensive track record *For more details, please refer to the PDF materials or feel free to contact us.
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【Device Specifications (Excerpt)】 ■Wafer Size: φ200mm・φ300mm ■Wafer Material: Silicon (Compound semiconductors such as SiC require separate specification discussions) ■Processing Tank and Configuration: Specifications to be discussed separately based on line configuration ■HEPA or ULPA: Quantity determined by configuration ■Chemicals: O3, HF, NCW, KOH, NH4OH, H2O2, HCL, EDTA, HCL, Citric Acid, DIW ■Robot ・Manufactured by PHT or PHOENIX ENGINEERING: Vertical Axis (AC Servo Drive) + Travel Axis (AC Servo Drive) + Chuck Mechanism (Air Driven) ■Chemical Temperature: Capable of handling up to 100℃ ■Chemical Tank: Pendulum Swing, Rotation, Ultrasonic *For more details, please refer to the PDF document or feel free to contact us.
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Company information
PHT Corporation is a company engaged in the semiconductor transport system business and semiconductor cleaning equipment business. Features PHT will actively operate globally as a niche top company in the semiconductor industry, specializing in wafer automatic peeling equipment (peeling cleaning machines). PHT has proposed transport and cleaning solutions for compound semiconductors, including next-generation SiC (silicon carbide) and GaN (gallium nitride) materials, utilizing silicon wafer transport and laser processing technology. We are particularly proactive in approaching the power semiconductor market. Our company is creating a comprehensive solution provision system for semiconductor manufacturing equipment aimed at energy conservation (electric vehicles, power control).