It is a wafer automatic transfer device that transfers wafers to process and detection modules via a robot in a clean environment.
Equipped with a high-performance AC servo motor, it achieves high-speed transport with a generous load capacity. It allows for optimal placement of robots, load ports, and hands. It inherits over 20 years of robot technology operating in harsh environments. 【Features】 ■ Capable of mounting 1 or 2 aligners, enabling high throughput ■ Various variations and custom options available ■ Compatible with both 200mm and 300mm *For more details, please refer to the PDF document or feel free to contact us.
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**Product Overview (Excerpt)** ■ Transport Target: 300mm wafer (Diameter: φ300±0.2mm, Thickness: 775μm) ■ Carrier - 300mm FOUP 25 slots (SEMI E47.1) - 300mm FOSB 25 slots (SEMI M31) ■ Power Supply Voltage: Single-phase AC200V±10% 50/60Hz±5% ■ Power Consumption: 4kVA (20A/200VAC) including FFU ■ Vacuum (Initial Pressure): -80kPa to -90kPa ■ Vacuum (Flow Rate): 40L/min, 50L/min ■ Positive Pressure (Initial Pressure): 0.6MPa to 0.7MPa ■ Positive Pressure (Flow Rate): 20L/min, 30L/min *For more details, please refer to the PDF document or feel free to contact us.*
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For more details, please refer to the PDF document or feel free to contact us.
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Company information
PHT Corporation is a company engaged in the semiconductor transport system business and semiconductor cleaning equipment business. Features PHT will actively operate globally as a niche top company in the semiconductor industry, specializing in wafer automatic peeling equipment (peeling cleaning machines). PHT has proposed transport and cleaning solutions for compound semiconductors, including next-generation SiC (silicon carbide) and GaN (gallium nitride) materials, utilizing silicon wafer transport and laser processing technology. We are particularly proactive in approaching the power semiconductor market. Our company is creating a comprehensive solution provision system for semiconductor manufacturing equipment aimed at energy conservation (electric vehicles, power control).
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