High precision through equipment introduction - Zygo laser interferometer, ultra-precision surface grinder.
The introduction of an interferometer that measures within one of the largest measurement ranges in the country with nanometer precision, along with a super-precision surface grinding machine equipped with oil hydrostatic guidance and precision machining systems, has achieved high precision in products.
With the new introduction of the "Zygo laser interferometer" and "ultra-precision surface grinding machine," we are now able to deliver ceramic parts and metal matrix composite (MMC) parts with even higher precision. We also meet the advanced demands of cutting-edge fields such as "semiconductors" and "space." We provide optimal solutions from our extensive lineup. Please feel free to consult with us. ■ Laser interferometer: Evaluates surfaces of up to 450mm x 1,000mm with nm precision, one of the largest in Japan. ■ Ultra-precision surface grinding machine: Ultra-high precision (below 1μm) with versatile shape processing (straight, flat, uneven, etc.).
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basic information
【Specifications of Newly Introduced Equipment】 Laser Interferometer ・Camera Resolution: 1,200x1,200 pixels ・Wavelength λ: 633nm ・Reproducibility: 0.06nm, λ/10,000 (2δ) ・Measurement Range TF: 450mm ・Measurement Range RF: 1,000mm Ultra-Precision Surface Grinding Machine ・Table Working Surface: 2,000x600mm ・Stroke: X: 2,600mm Y: 625mm Z: 720mm
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Applications/Examples of results
<Semiconductor Inspection Equipment / Stage Components> ● Example 1: [Size] 690x45mm [Material] SS701 (Metal-Ceramic Composite) [Flatness] 0.543μm* ● Example 2: [Size] 918x60mm [Material] SS701 (Metal-Ceramic Composite) [Flatness] 0.745μm* <Semiconductor Manufacturing Equipment / Vacuum Suction Chuck> [Surface Accuracy of Pin Chuck Section] Overall PV 0.209μm* *Evaluated with Zygo Laser Interferometer
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As a member of JGC Group, JFC challenges the possibilities of the material of fine ceramics with our own technologies. We actively engage in fundamental and applied research on ceramics, product application development, as well as manufacturing and sales. We respond to the diverse needs of various advanced industries with our unique technologies and products, including high-frequency ceramic substrates and circuit components, ceramic parts for industrial machinery, and the prototyping and development of metal-ceramic composite materials (MMC).
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