Minimizing contamination, maintenance, and vibration - bearingless magnetic levitation centrifugal pump.
[Domestic Authorized Dealer] LEVITRONIX Bearingless Pump Achieves liquid delivery performance and control performance that meet the demands of advanced processes!
Achieving three high-performance "Minimals"! "Minimal" Contamination The non-contact structure does not have components such as bearings, bushings, or opening and closing valves that can generate dust in the liquid-contact area. Therefore, there is no concern about contamination caused by the pump. Additionally, high-purity fluororesin, which has excellent chemical resistance, is used for the impeller and casing materials, eliminating worries about contamination. Structurally, the risk of contamination is minimized. "Minimal" Maintenance There are no sliding parts inside the pump, which means that there are no wear components that require maintenance. Furthermore, the impeller is driven by magnetic control, so there are no consumable parts typically required in conventional mechanical control. Due to these structural features, the frequency of maintenance is kept to a minimum. "Minimal" Pulsation and Vibration The impeller is rotated and liquid is delivered through magnetic control, resulting in no pulsation or vibration. Additionally, the absence of sliding parts ensures that there is no noise, providing a quiet environment. With high control performance at elevated speeds, precise flow delivery is achieved.
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basic information
■Magnetic Levitation Centrifugal Pump Realizing Precise Liquid Delivery The Levtronics pump is an innovative pump that does not have bearings or opening and closing valves, which are causes of contamination. Based on the principle of magnetic levitation, the impeller floats non-contact within a sealed pump casing and is driven by electrical magnetic control. This structure and system enable precise control of fluid pressure and flow rate. Of course, the impeller and pump casing, which come into contact with the liquid, are made of high-purity fluororesin, providing excellent chemical resistance. ■Non-Friction, Non-Contact Structure Each liquid-contacting component is designed to avoid mutual contact, eliminating dust generation from friction and allowing for very clean liquid delivery. Since there are no consumables such as bearings or opening and closing valves, regular maintenance typically required is unnecessary. This reduces maintenance parts and labor costs, as well as minimizes production opportunity loss during maintenance work. Regarding product lifespan, the absence of consumable parts typical in mechanical structures gives it a significant advantage over pump products with other structures.
Applications/Examples of results
■Plating Process Due to non-pulsation, the plating solution is supplied at a very stable flow rate. Additionally, with electronic control functions, the delivery is performed with high precision. This allows for optimal management of plating thickness and contributes to reducing polishing costs in the next CMP process. ■CMP Process Mainly used for slurry delivery. Compared to conventional diaphragm pumps and bellows pumps, there is no "shear force" on the slurry, which helps to suppress slurry aggregation. As a result, it can reduce micro-scratches, one of the most significant causes of defects in CMP, by up to 80%. Furthermore, if a filter is used in the equipment, the timing for filter replacement can be output as an alarm based on the pump rotation speed. ■Cleaning Process Particles in the wet process are 1/10 to 1/50 of those from other pumps. It achieves low particle counts and stable delivery without pulsation for cleaning equipment.
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The SCREEN Group has celebrated its 80th anniversary. Since its establishment in 1943, we have received tremendous support from all of you, and on October 11, 2023, the SCREEN Group marked its 80th anniversary. We sincerely thank you. With the spirit of continuing to challenge creativity and development, we will continue to evolve.
