High TMR, high sensor sensitivity and cost reduction can be realized using FeSiAl alloy. Low HK can be obtained for FeSiAl films with wide composition range.
TMR sensor is known to be a high sensitivity magnetic sensor which uses the tunnel magnetoresistance effect (TMR) in magnetic tunnel junctions (MTJs). The TMR sensor performance can be controlled by controlling the magnetic anisotropy (HK) of the free layer. Therefore, it is expected to be applied to the bio-magnetic measurement device that detects the weak magnetic field of a living body at room temperature, the battery level detector for electric vehicle, non-destructive inspection to detect the rupture or deterioration of reinforcing steel bar in concrete structure, etc. NiFe alloy, CoFeB alloy and CoFeSiB alloys have been conventionally developed as free layer of MTJ devices for TMR sensor, but higher sensitivity and lower cost are required. This invention focused on FeSiAl alloy (Sendust) to produce the Sendust thin film of nanometer order thickness which was not able to fabricate. Therefore, this alloy is applied to the free layer to fabricate the MTJ devices that achieve the same level of sensor sensitivity as NiFe alloy, etc. It has been also revealed that the soft magnetic property is excellent over a wider range of composition compared with conventional Sendust.
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The revenue generated from technology transfer is reinvested as new research funding for universities and researchers, and is utilized to create further research outcomes. To ensure the smooth operation of this cycle, known as the "Intellectual Creation Cycle," we will vigorously promote technology transfer. The types of seeds we handle include patents, know-how, databases, and programs. We have established a collaborative framework by signing basic technology transfer agreements with the following universities (as of June 1, 2025): Tohoku University, Hirosaki University, Iwate University, Akita University, Fukushima University, Yamagata University, Tohoku Gakuin University, Iwate Medical University, Fukushima Medical University, Aizu University, Miyagi University, Hokkaido University, Muroran Institute of Technology, and Showa Medical University.
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