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  5. Wafer processing/polishing equipment
  6. Large Sample Polishing Device 'MA-600e RECT'

Large Sample Polishing Device 'MA-600e RECT'

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MA-600e RECT

last updated:Feb 20, 2024

ムサシノ電子
ムサシノ電子
  • Official site

From Φ600mm circular samples to polishing large panels.

The "MA-600e RECT" is ideal for surface polishing of large panel-type samples (such as glass or sapphire). The flexible pad of the upper oscillation unit allows for uniform polishing of the sample surface. 【Features】 ● Optimal for polishing large diameter samples By securing the sample on a Φ600mm stage, it is possible to polish the entire surface of large diameter samples. The sample is fixed by adhering it to a Φ600mm SUS plate with thermal wax and vacuum chucking the plate. ● Complex polishing possible with program settings The rotation speed and pressure of the spindle and pressure axis, as well as the oscillation width, can be set. ● Realization of safe polishing operations Emergency stop switches, leakage breakers, and interlock covers ensure safe and secure polishing operations. *For more details, please refer to the PDF document or feel free to contact us.

    Wafer processing/polishing equipment
MA-600e_RECT_201911.png

Large Sample Polishing Device 'MA-600e RECT'

MA-600e_RECT_201911.png
MA-600e_RECT_201911.png
  • Related Link - https://www.musashino-denshi.co.jp/grinder/tokuchu…

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basic information

This device is a surface grinding system that performs lapping and polishing by fixing the sample in a vacuum chuck on the lower Φ600mm spindle stage and rotating the upper pressure axis head. The pressure head (upper table) that holds the grinding disk has a mechanism that moves left and right, allowing the entire workpiece to be polished. *For more details, please refer to the PDF document or feel free to contact us.*

Price range

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Delivery Time

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※3 to 6 months

Applications/Examples of results

【Usage】 ■Sample preparation for research and development ■Inspection by the quality assurance department ...etc. *For more details, please refer to the PDF document or feel free to contact us.

Detailed information

  • MA-600e_RECT_operation_201911.jpg

    It is possible to perform program polishing that includes oscillation distance and oscillation speed. The operation can be done from the touch panel.

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Large Sample Polishing Device MA-600e RECT

Large Sample Polishing Device MA-600e RECT

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ムサシノ電子

ムサシノ電子

Industrial Machinery

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Our company has been manufacturing polishing equipment, cutting machines, and scribers suitable for precision machining using the technical know-how we have cultivated over many years. We have a significant track record, particularly in cutting-edge technology fields such as semiconductors, ceramics, and optical communications. In addition to standard specification equipment, we also accept the design and manufacture of custom specifications tailored to our customers' needs. To meet the increasing demands for precision in machining and the diversifying needs, we will continue to advance with innovative ideas and technology.

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