A high-resolution (<1μm) X-ray automatic inspection system designed for micro samples, such as wire bonding and micro bump bonding.
The XS series is a compact, high-resolution automatic X-ray inspection system designed for high-performance and high-speed inspection of semiconductor samples, wire bonding, single/multi-panel PCB assemblies, and samples on trays. It is capable of inspecting applications ranging from component-level inspections to medium-sized SMT boards.
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basic information
【Features】 - High-speed AXI system with the smallest installation space for inline setup - Equipped with a micro-focus X-ray generator (sealed type / maintenance-free) - Minimum resolution <1μm - Multi-control motion system with linear drive - Digital CMOS flat panel detector - Automatic grayscale & magnification calibration function - Compatible with MES and SECS/GEM interfaces for traceability management of all products Additional Options - Configuration allowing loading/unloading from one side - Barcode scanner for recording serial numbers and product type sorting - Automatic barcode reader scan station (x-y gantry structure) - Radiation dose reduction filter Models XS2.5 Transmission (2D) + SFT + Off-axis (2.5D) XS3 Transmission (2D) + SFT + Off-axis (2.5D) + 3D
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Applications/Examples of results
【Usage】 - Semi Backend Setup: Inspection of semiconductor wire bonding, optical devices & complex PCBs, and flexible substrates. - SMT Setup: Inspection of components and solder joints in PCB, hybrid, and chip-level assembly processes.
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We respond flexibly and promptly to customer needs. In the "trading company" functional area, we are fully committed to providing truly attractive products and services that meet customer needs by collaborating with leading specialized manufacturers and utilizing advanced mechatronics technology to add value, thereby adapting to a highly information-oriented society. In the "mechanical parking equipment" business, we manufacture and install high-quality, environmentally friendly, and safety-conscious products to meet various customer needs. Based on our accumulated wealth of experience and technology, we provide 24-hour maintenance services through a nationwide service network, earning strong trust from our customers. The "freeze-drying equipment" business consistently develops next-generation "freeze dryers," including the sealed tube-type freeze dryer, which received the Minister of Economy, Trade and Industry Award from the Japan Industrial Machinery Manufacturers Association. We deliver and maintain both small-scale research and large-scale production equipment, and we also support the development of pharmaceuticals and food, establishing ourselves as an industry leader and receiving high praise. ◆ Locations Sapporo, Hitachi, Nagoya, Osaka, Fukuoka, Yamaguchi ◆ Overseas Subsidiary Thailand - Business activities: Sales of resin molded products, metal processed products, sheet metal, packaging materials, and electronic components.