Top Hat Beam Shaper Technology

It is a high-precision top-hat beam shaper that is not limited to specific wavelengths, thanks to a smooth aspheric lens.

The top hat beam shaper from Ayase utilizes diffraction of light to convert a Gaussian beam into a top hat (uniform intensity distribution), similar to conventional DOE methods, but it possesses excellent features that set it apart from DOE methods. These can be considered as an innovative top hat beam shaper that addresses the shortcomings of traditional DOE methods. *【Multi-wavelength compatibility】One element can accommodate a wide range of wavelengths. *【High precision】No false spots, improving light irradiation and measurement accuracy. *【High efficiency】High theoretical efficiency and improved performance stability. *Can convert to line, square, or circular light beams. μLINEMAN (LBS) .... Uniformly illuminated line μSQUAREMAN (MBS) .. Uniformly illuminated square will be formed at the desired focal position. μLINEMAN and μSQUAREMAN can accommodate multiple light sources by leveraging the aforementioned features. Additionally, customization is possible for size adjustments of lines and squares, conversion to circular or rectangular shapes, or even transformation to intensity distributions other than top hats.

Electron beam lithography equipment