i-line stepper exposure device
CANON/NIKON FPA3000 series/NSR-i6 to i14, SF series
We provide service for Canon FPA3000 and Nikon NSR.
The FPA3000 series, which is an i-line stepper, has a proven track record as a standard silicon wafer production machine, and it is highly regarded for its ability to handle the characteristics of compound wafers, such as warping and weight, making it widely supported in that field. Our company is committed to maintaining appropriate inventory levels and has established a demo environment equipped with a developer, microscope, and CDSEM. 【Equipment Modification】 ■ Sale of refurbished used equipment ■ Wafer size change ■ Reticle size change ■ Change of reticle changer type ■ Chamber refrigerant modification 【Parts Sales】 【Parts Repair】 ■ Repair of circuit boards 【Regular Maintenance】 【Relocation Services】 ■ In-house relocation ■ Factory relocation 【Troubleshooting】
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basic information
【Specifications】 ■ FPA3000iw 6” 〇 8” 〇 Resolution 0.8μm Magnification 1/2 NA 1/2 ■ FPA3000iw 4” 〇 5” 〇 6” 〇 8” 〇 Resolution 0.35μm Magnification 1/5 NA 0.45~0.63 ■ FPA3000i5 4” 〇 5” 〇 6” 〇 8” 〇 Resolution 0.35μm Magnification 1/5 NA 0.45~0.63 ■ FPA3000i5+ 4” 〇 5” 〇 6” 〇 8” 〇 Resolution 0.35μm Magnification 1/5 NA 0.45~0.63
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Delivery Time
※The delivery date may vary depending on the specifications, so please feel free to contact us.
Applications/Examples of results
For more details, please refer to the external link or feel free to contact us.
Company information
We offer proposals for semiconductor manufacturing equipment and its components, tailored to customer needs from new to used items. In addition to importing and selling as an authorized distributor for overseas manufacturers, we also provide refurbished products with warranty and after-sales service. Furthermore, we can handle the purchase of excess equipment as well as relocation and removal. Our staff resides in the area, so please consult us for support overseas, particularly in Asia. We leverage our experience to comprehensively support your production operations.
