Batch exposure machine
CANON MPA500, 600 series / PLA500, 600 series
Mirror projection mask aligner, a unit that enables double-sided exposure with contact aligners. There is also a proven track record for IR (near-infrared) specifications.
There is a strong demand for mirror projection exposure machines that can perform batch exposure without damaging masks. This machine has contributed to the production of MEMS, such as transistors and power semiconductors, for many years with its compact footprint and low maintenance costs. It continues to tackle challenges related to degradation over time, such as reduced illuminance and deterioration of resolution and uniformity, through unique technologies like mirror regeneration. 【Equipment Modification】 ■ Sale of refurbished used equipment ■ Change of substrate size ■ Chamber refrigerant modification ■ Mirror regeneration 【Parts Sales】 【Pickup Overhaul】 【Regular Maintenance】 【Relocation Services】 ■ In-house relocation ■ Factory relocation 【Troubleshooting】
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basic information
【Specifications】 ■ MPA600FA 4” 〇 5” 〇 6” 〇 Deformation 〇 Resolution 1.5μm Depth of focus ±6μm or more ■ MPA600Super 4” 〇 5” 〇 6” 〇 Deformation 〇 Resolution 1.5μm Depth of focus ±6μm or more TVNA 〇 Furthermore, by equipping the back exposure unit (IRAS) developed by our group, back exposure becomes possible. Of course, retrofitting to MPA units owned by customers is also possible.
Price range
Delivery Time
※3 months (Please feel free to contact us as the delivery time may vary depending on specifications.)
Applications/Examples of results
For more details, please refer to the external link or feel free to contact us.
Company information
We offer proposals for semiconductor manufacturing equipment and its components, tailored to customer needs from new to used items. In addition to importing and selling as an authorized distributor for overseas manufacturers, we also provide refurbished products with warranty and after-sales service. Furthermore, we can handle the purchase of excess equipment as well as relocation and removal. Our staff resides in the area, so please consult us for support overseas, particularly in Asia. We leverage our experience to comprehensively support your production operations.
