Hirosaki Univ. Technology : Reliability evaluation method of Multilayer wiring : K23-014
Accurate evaluation of electromigration damage
With the high integration of electronic devices, high temperature of metal wiring and high current density used in circuits are increasing. Then, electromigration (EM) damage due to metal fatigue becomes a problem, which may cause disconnection failure. Therefore, it is important to evaluate the reliability of wiring. Conventional reliability evaluation methods include empirical equations (Black's equation), but tests for each wiring structure are necessary, and evaluation accuracy is also problematic. Since threshold current density of EM damage exists in multilayer wiring with via connections, evaluation studies of threshold current density have conventionally been conducted. However, evaluation of the EM damage process leading to the generation and growth of voids and disconnection has not been achieved, and a highly accurate evaluation method has been required. In order to solve the above problems, we have developed a method for evaluating wire life and allowable current with high accuracy and simplicity. In the present invention, the parameters controlling EM damage can be specified and the atomic concentration distribution inside the wiring can be simulated. By utilizing this method, it is also possible to design an effective reservoir structure to improve the threshold current density.
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The revenue generated from technology transfer is reinvested as new research funding for universities and researchers, and is utilized to create further research outcomes. To ensure the smooth operation of this cycle, known as the "Intellectual Creation Cycle," we will vigorously promote technology transfer. The types of seeds we handle include patents, know-how, databases, and programs. We have established a collaborative framework by signing basic technology transfer agreements with the following universities (as of June 1, 2025): Tohoku University, Hirosaki University, Iwate University, Akita University, Fukushima University, Yamagata University, Tohoku Gakuin University, Iwate Medical University, Fukushima Medical University, Aizu University, Miyagi University, Hokkaido University, Muroran Institute of Technology, and Showa Medical University.
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