Metal seal MFC with diaphragm-type valve! Compatible with corrosive fluids due to EP treatment and oxidation film treatment.
The "MODEL ST-500 SERIES" is a mass flow controller equipped with PI functionality (Pressure Insensitive). It features a pressure sensor installed before the flow sensor, which captures pressure fluctuations and compares them to the pressure before the fluctuation, allowing for real-time adjustments to the valve opening. This enables stable flow control in response to pressure variations. It is suitable for gas supply processes that require stability and accuracy, such as semiconductor manufacturing equipment. 【Features】 ■ Stable flow control in response to pressure fluctuations (only for ST-500) ■ Supports DeviceNet, EtherCAT, and RS485 (only for ST-550) ■ Compatible with IGS W seal fittings ■ High-precision measurement control with S.P. accuracy, response time within 1 second across the entire flow control range ■ Multi-range function via a dedicated app (30-100% F.S.) *For more details, please download the PDF or feel free to contact us.
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【Standard Specifications】 ■ Sensor Type: Thermal Wire-Wound Sensor ■ Valve Type: Proportional Solenoid Valve (Closed when not energized) ■ Full Scale Flow Rate (N2 Equivalent): 10 SCCM to 10 SLM, 30 SLM ■ Control Range: 2 to 100% F.S. ■ Response Time: Within 1 second ■ Accuracy ・±1% S.P. (10 to 100% F.S.) ・±0.1% F.S. (2 to 10% F.S.) *For more details, please download the PDF or feel free to contact us.
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The environment surrounding the Earth consists of gases and liquids. The technology to measure, control, and generate these is essential for the development of society and industry, and can be considered a foundation that supports the next generation of manufacturing. For over 70 years, Kofloc has been exploring measurement and control technology primarily for small fluid volumes under the motto "Science of Fluids." We have built trust across diverse fields and now boast a top domestic market share in various sectors. Kofloc continues to challenge itself with new technologies that create a future for people and the Earth, striving to realize a rich life for everyone.