Mass flow usable at a high differential pressure of 1.0 MPa and a low differential pressure of 10 kPa.
Burkert mass flow controller
Mass flow controller (MFC) compatible with a wide range of operating pressures. It enables high-speed response within 0.3 seconds. It can also control large flow rates!
Industrial mass flow controllers by Bürkert! These mass flow controllers boast various specifications tailored to different industries, setting them apart from competitors with unique features. Beyond pressure range, Bürkert's industrial mass flow controllers offer: ● Rangeability → High precision of 1:100 ● High flow rate → Capable of controlling 2500 Nl/min (equivalent to nitrogen) with a single unit ● Warm-up operation → Ready in 1 minute ● Tight shut-off capability → Reduces costs and space for solenoid valves Additionally, as IoT generation mass flow controllers, they support various communication standards: EtherCAT, EtherNet/IP, Modbus/TCP, PROFINET.
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basic information
【Features】 By equipping our uniquely high-performance flow control valve (proportional solenoid valve), we have improved various specifications and added communication functions, giving birth to a mass flow device for the IoT generation. ◆ Actual gas calibration is performed before shipment from the factory. There is no need to individually input conversion factors (gas coefficients). ◆ The maximum flow rate can be adjusted to meet customer conditions, minimizing full-scale error. ◆ No dedicated power supply unit is required; it can be used with a general-purpose DC 24V. ◆ We can assist with accuracy calculations according to the customer's required precision. ◆ Various settings for the mass flow controller/mass flow meter can be checked and changed via a computer. The software can be downloaded for free from our website, with no update costs!
Price information
The price varies depending on the quantity, so please feel free to contact us.
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Applications/Examples of results
■ Vapor Deposition Equipment (PVD) ■ Laser ■ Thermal Spraying ■ Welding ■ Cutting ■ Various Combustion Furnaces ■ Exhaust Gas Combustion Equipment ■ Cultivation Equipment ■ Refining Process ■ Thermal Analysis Equipment ■ Precision Glass Manufacturing ■ Various Fuel Cell Applications and more
Detailed information
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We also propose gas control units that include MFCs! Not only do we offer high-performance standalone MFCs, but we also provide proposals for multiple MFCs and various sensors as a unit, taking into account maintainability and ease of use. Compared to conventional MFCs, our unique solution proposals (such as gas control units) can perform multiple roles with just one unit, achieving maintainability and space-saving features for your gas control needs!
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The new IoT generation MFC has also arrived. It is compatible with OpenCAN and Burkert's dedicated BUS, and a new MFC that matches IoT orientation has been introduced. Connections to networks and PCs, as well as smart control of multiple MFCs, are planned to be implemented sequentially. We especially encourage you to consider its use for mass flow introduction in research labs and small lab buildings!
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New MFC Models Compatible with OpenCAN Released The Type874X series, compatible with OpenCAN, has also been newly released. The Type874X series is designed to facilitate the smooth use of multiple MFCs, achieving high cost performance when used in multiple units. Compared to conventional mass flow controllers, it can control a wide range of functions with a single unit, allowing us to provide solution proposals not only for individual components but also for gas control itself!
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Company information
Founded in 1946 in Southern Germany, Bürkert has been a long-established manufacturer of fluid control equipment for over 70 years, producing valves, solenoid valves, sensors, mass flow controllers, and more for various applications. Today, we have five factories in Germany and France and have grown into a global company with sales offices in 37 countries. Bürkert Japan, celebrating its 25th anniversary, offers a lineup of products tailored to Japanese standards and practices. In recent years, the introduction of IoT in many production sites has become a hot topic, with discussions not only on efficiency and cost reduction but also on predictive maintenance and smart solutions leveraging IoT. Bürkert provides solutions that easily achieve automatic regulation with IoT devices for process automation. We support various communication formats to realize IoT applications that are beneficial on-site. We offer a wide range of solutions, not only providing individual components like control valves and sensors but also system proposals, so please feel free to consult with us.
