It is a high vacuum deposition device that supports a variety of options.
The advanced sample preparation begins with clean high vacuum. It is a clean high vacuum deposition system that employs a turbo molecular pump (TMP) exhaust system. High vacuum contributes to improved film purity and film density. By pressing the EVAC START button on the panel, the system automatically transitions from rough pumping to high vacuum pumping. It features a touch panel and program control for a safety design that prevents operational errors. The VE-2050 comes with a variety of optional accessories. We also accept modifications to add functions tailored to research purposes.
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basic information
● Power Supply: AC 100V (single-phase 100V 15A with ground wire) ● Device Size: Width 534mm, Depth 675mm, Height 1134.5mm (Device Weight 80kg), equipped with two-wheel stopper casters ● Vacuum Exhaust System: TMP (67L/sec) + Rotary Pump (50L/min) ● Achievable Vacuum Level: Below 5×10-4Pa ● Vacuum Measurement: Full-range vacuum gauge ● Vacuum Chamber: Inner diameter 200mm × Height 248mm, standard ICF70 service port ● Sample Stage: Horizontal sample table with a diameter of 58mm (standard attachment) ● Heating Electrode Columns: 2 pairs of 4 pieces, selectable for use by switch. Columns are detachable. ● Standard included support electrode for aperture baking boat (1 pair). Metal deposition is possible using a tungsten basket. ● Heater Power Supply: Maximum current 80A (when using standard boat) ● Deposition Area: Using columns, when depositing from above = within a diameter of 90mm. When depositing from below = up to approximately 180mm in diameter ● Safety Measures: In case of power failure / all electromagnetic valves close, air leak to PR. ● Upon power restoration / vacuum system maintains the stopped state. Returns to the initial state.
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P5
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Company information
We manufacture sputtering devices, deposition devices, plasma irradiation devices, CVD devices, and vacuum components. We offer a lineup of pre-treatment devices for electron microscope sample preparation and small vacuum devices for research and development institutions. We believe it is our company's mission to quickly and affordably supply the necessary equipment development for those active in cutting-edge technology research and development, and to support development by making incremental improvements and modifications during the experimental process. We are involved in the development, commercialization, sales, and service of experimental instruments and devices necessary for new technology development in the fields of semiconductors, biotechnology, environment, and nanotechnology, as well as devices related to electron microscope sample preparation as cutting-edge analytical tools for new technology development.