Compatible with 300mm wafers.
It is a tabletop spinner. The addition of a resist coating function and CtoC automation is also possible. Equipment tailored to various sizes, such as WSP-32 for Φ2 inches to Φ6 inches, can also be manufactured.
Inquire About This Product
basic information
WSP-52 Specifications Main Frame: General structural steel + baked paint Cup Material: SUS304 Sample Table: Delrin, other specifications available upon request Work Set: Vacuum chuck table method Vacuum Pump: Separate unit included, with vacuum pressure switch Motor: AC servo motor Speed: Max 4000 rpm, provided there is no imbalance *Optional support up to 12000 rpm Safety Devices: Leakage circuit breaker function : Overload alarm function : Vacuum switch Steps: Operation pattern, up to 4 types can be registered : Rotational speed, rotation time, 3-stage control *Optional support for changing the number of patterns and steps Power Supply: AC 100V, 7A, 50/60Hz
Price range
Delivery Time
※Please feel free to contact us.
Applications/Examples of results
It is used in processes such as the resist coating process for semiconductor manufacturing silicon wafers and glass, and the cleaning process for mask glass.
Company information
This company is involved in a wide range of equipment manufacturing, from research and development devices such as semiconductor manufacturing equipment, LCD manufacturing equipment, and medical and nursing care equipment to production facilities. Their motto is "Starting with a small first step," and they focus on turning ideas into reality.
