Tohoku Univ.Technology : Piezoelectric thin film & Piezoelectric device : T17-157
MgHfAlN film, World’s Highest FoM
Lead zirconate titanate (PZT) has been widely used as a piezoelectric material in sensors, actuators, and related applications. However, the presence of toxic Pb (lead) in PZT necessitates the search for safer alternatives. This innovative solution introduces a MgHf co-doped AlN thin film that exhibits exceptional piezoelectric properties. The MgHfAlN film is not only lead-free but also achieves groundbreaking performance, boasting the world's highest figure of merit (FoM) exceeding 45 GPa. Additionally, its piezoelectric strain constant (d33) exceeds 23 pm/V, and it delivers an impressive output power of 40 mW within a compact device size of just 1cc. This technology holds significant potential for applications in vibration-powered generator, electric field sensors, force sensors, slip sensors, and more.
Inquire About This Product
basic information
For details, please contact us or refer to the PDF.
Price range
Delivery Time
Applications/Examples of results
For details, please contact us or refer to the PDF.
catalog（1）
Download All Catalogs
Company information
The revenue generated from technology transfer is reinvested as new research funding for universities and researchers, and is utilized to create further research outcomes. To ensure the smooth operation of this cycle, known as the "Intellectual Creation Cycle," we will vigorously promote technology transfer. The types of seeds we handle include patents, know-how, databases, and programs. We have established a collaborative framework by signing basic technology transfer agreements with the following universities (as of June 1, 2025): Tohoku University, Hirosaki University, Iwate University, Akita University, Fukushima University, Yamagata University, Tohoku Gakuin University, Iwate Medical University, Fukushima Medical University, Aizu University, Miyagi University, Hokkaido University, Muroran Institute of Technology, and Showa Medical University.
![[Leveling Correction] Leveling correction of concrete floors "Teratec Method"](https://image.mono.ipros.com/public/product/image/d08/1267539002/IPROS70063422645318547243.jpeg?w=280&h=280)
