This is a method that allows simultaneous shape observation and elemental imaging of small areas using a FIB and a TOF mass spectrometer mounted on an SEM device.
? Surface analysis of solid materials is possible ? Light elements such as Li, which are difficult to evaluate with EDX, can be assessed ? By using Ga ions as primary ions, evaluation can be performed with high surface resolution (on the order of tens of nm) ? The detection limit is as low as a few ppm (depending on the element), making it suitable for trace impurity element analysis compared to EDX ? Measurements can be conducted without atmospheric exposure by using a dedicated holder ? Since it is mounted on a SEM device, morphological observation and elemental analysis can be performed within the same chamber
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Applications/Examples of results
- Visualization of elemental distribution through surface analysis (approximately a few micrometers to 200 micrometers in size) - Evaluation of the distribution of H, Li, and F in electrodes of lithium-ion secondary batteries, and assessment of degradation - Composition analysis of foreign substances on the submicron order
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MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!