Can be processed into various semiconductor substrates, glass, diamonds, etc.
Our company has a track record of processing various wafers at a sub-micron scale. Additionally, we can process according to your desired periodic patterns and aspect ratios, and we also offer suggestions from the design of the patterns.
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basic information
Processing achievements (partial) ■Sapphire ■Quartz (SiO2) ■GaN ■Diamond (C) ■AlN ■SiC ■InP Gases used ■Ar ■Cl2 ■O2 ■BCl3 ■CF4 ■SF6
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Company information
Our company, E&E Evolution Co., Ltd., is a startup originating from Meijo University located in Nagoya City, Aichi Prefecture. We conduct contract processing and research based on fundamental research related to nitride-based LED devices cultivated in the university's semiconductor laboratory, leveraging our strengths in technology and know-how derived from various processing techniques. We can handle multiple processes, including fine processing on semiconductor wafers, growth of nitride semiconductor crystals, and device process fabrication, as well as individual processes related to semiconductor manufacturing such as metal film deposition, dry etching, substrate dicing, and polishing. Additionally, we are striving to establish ourselves as a company developing innovative light sources and systems, pursuing the potential of semiconductors through research and development, and challenging ourselves to create technologies that can change the world.