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  5. Flow Control
  6. Mass Flow Controller 'SFC6000D-20slm'

Mass Flow Controller 'SFC6000D-20slm'

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last updated:Jul 23, 2025

センシリオン
センシリオン
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Excellent price-performance ratio! This is a very attractive product with a delivery time of 8 weeks.

The "SFC6000D-20slm" is a mass flow controller that is very small and lightweight, allowing for optimization of the device's size and weight. Due to advanced integration and a very low number of electronic components used, the supply chain is robust. Furthermore, it demonstrates excellent performance in terms of reproducibility, accuracy, control range, and speed. 【Features】 ■ Excellent price-performance ratio ■ Delivery time of 8 weeks ■ Very small and lightweight, enabling optimization of device size and weight ■ Outstanding performance in terms of reproducibility, accuracy, control range, and speed ■ Robust supply chain due to the very low number of electronic components used *For more details, please download the PDF or feel free to contact us.

    Flow Control
?マスフローコントローラー『SFC6000D-20slm』

Mass Flow Controller 'SFC6000D-20slm'

?マスフローコントローラー『SFC6000D-20slm』 画像.png
?マスフローコントローラー『SFC6000D-20slm』 画像.png
  • Related Link - https://sensirion.com/jp/products/catalog/SFC6000D…
  • Special site - Product/service details - https://pr.mono.ipros.com/sensirion/product/

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basic information

【Mass Flow】 ■ Full scale flow: 5 slm ■ Full scale flow: 5000 sccm ■ Accuracy: 0.2% FS or 2% SP ■ Maximum operating pressure: 10 bar ■ Calibration: Air, N2, O2, N2O, Ar and CO2 flow ■ Fluid connector port: Push-in 6mm, downmount *For more details, please download the PDF or feel free to contact us.

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Applications/Examples of results

【Applications】 ■ Front Opening Unified Pod (FOUP) ■ Glass Coating and Treatment ■ Gas Chromatography ■ Bioreactor ■ Anesthesia ■ Ventilation ■ Artificial Heart-Lung Machine ■ N2O Therapy ■ Industrial Automation *For more details, please download the PDF or feel free to contact us.

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Mass flow controller

Mass flow controller

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Optimal for FOUP gas purge control in semiconductor manufacturing! Sensirion's high-precision mass flow controller "SFC6000D".

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Sensirion's "SFC6000D" is a mass flow controller optimized for FOUP (Front Opening Unified Pod) applications. In semiconductor manufacturing, a three-dimensional structure with an extremely high aspect ratio is required, and precise gas purge control is essential. The SFC6000D achieves accurate and stable gas flow control, contributing to yield improvement and cost reduction. ■ Key Features - High precision and fast response: Accurately controls the flow of protective inert gas - Excellent reproducibility and long-term stability - No microcontroller required: Calibrated digital sensors directly control the valve - Communication interfaces: Supports RS485, Modbus RTU, I2C, and analog voltage - Pressure-resistant design up to 10 bar: Compatible with 5/20/50 slm models - Humidity resistance: Stable operation even in non-condensing humidity environments ■ Target Audience - Semiconductor manufacturing equipment manufacturers - Wafer transport equipment manufacturers - Cleanroom-related equipment manufacturers For more details, please contact us or use the document download option.

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センシリオン

センシリオン

Electronic Components and Semiconductors

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Sensirion's mission is to provide sensors and sensor solutions with excellent design and reliability, becoming the number one partner for our customers. We aim to elevate the standards of sensor technology by leveraging technology intelligence. In doing so, we contribute to improving the sustainability, efficiency, health, safety, and quality of life for people and businesses. We pursue a common goal of shaping the future of the automotive industry, industrial sectors, building and HVAC technology, medical technology, and consumer electronics through innovation in collaboration with our partner companies and customers. Sensirion was founded in 1998 and currently has about 1,000 employees at its headquarters in Stäfa, Switzerland, and numerous subsidiaries around the world.

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