The main body is made of metal! A version without a valve is also available.
The "SFC5400" is a versatile mass flow controller that can connect to various interfaces and fluid connections. It can measure a maximum flow rate from 50 sccm to 200 slm, and the sensor signal is calibrated on the chip and directly converted into a temperature-compensated digital signal. Additionally, it can store multiple gas calibration data in one device, allowing you to check whether the operating gas calibration value matches the actual gas being measured. 【Specifications (partial)】 ■ Full-scale flow rates: 1, 2, 5, 10, 20, 50, and 100 slm ■ Full-scale flow rates: 50, 100, 200, and 500 sccm ■ Accuracy: 0.08% FS or 0.8% SP ■ Maximum operating pressure: 5 bar ■ Calibration: Air, O2, N2, Ar, CO2, He, H2, CH4, N2O, SF6, and C4F8 flow ■ Fluid connector ports: Swagelok, VCO, VCR, Downmount *For more details, please download the PDF or feel free to contact us.
Inquire About This Product
basic information
【Other Specifications】 ■ Supply Voltage: 14 - 26.4 V ■ Average Supply Current: 50000 uA ■ Maximum Supply Current: 320000 uA ■ Interface: Analog voltage, Analog current, Device net, IO link, RS485 ■ Size (LxWxH): 101.1 x 24.4 x 91mm *For more details, please download the PDF or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
For more details, please download the PDF or feel free to contact us.
catalog（1）
Download All Catalogs
Company information
Sensirion's mission is to provide sensors and sensor solutions with excellent design and reliability, becoming the number one partner for our customers. We aim to elevate the standards of sensor technology by leveraging technology intelligence. In doing so, we contribute to improving the sustainability, efficiency, health, safety, and quality of life for people and businesses. We pursue a common goal of shaping the future of the automotive industry, industrial sectors, building and HVAC technology, medical technology, and consumer electronics through innovation in collaboration with our partner companies and customers. Sensirion was founded in 1998 and currently has about 1,000 employees at its headquarters in Stäfa, Switzerland, and numerous subsidiaries around the world.