Equipped with two valves, it allows for bidirectional control. Control can be performed using pressurization, negative pressure, or vacuum. Models that accommodate corrosive gases and low-pressure loss are also available in the lineup.
The "MCD/MCDS series" is a mass flow controller manufactured by ALICAT that can handle 98 different types of diverse gases with a single unit. It achieves fast response through a laminar flow method (differential pressure type). Equipped with a highly accurate differential pressure sensor, it measures flow rates precisely. In addition, we offer a lineup that supports 128 types of gases, including corrosive gases and refrigerant gases, such as the "MCDS series" and "MCDW series." 【Features】 ■ 100ms control response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Lineup from 0.5 SCCM to 5000 SLPM ■ Standard analog output and RS 232C communication ■ Compatible with mixed gases ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.
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【Lineup】 ■ MC/MCP/MCR Series (Standard Type) ■ MCS/MCRS Series (Corrosive Gas/Refrigerant Gas Compatible) ■ MCW/MCRW Series (Low Pressure Loss Type) ■ MCQ/MCRQ Series (High Pressure Type) ■ MCV/MCVS Series (Equipped with Shut-off Valve) ■ MCD/MCRD Series (Dual Valve) *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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■ High-performance mass flow meter/controller M/MC series ■ Low-pressure loss mass flow meter/controller MW/MCW series ■ Corrosive gas and refrigerant gas compatible mass flow meter/controller MS/MCS series ■ Intrinsically safe explosion-proof mass flow meter/controller IS-Max series ■ Liquid flow meter/controller L/LC/LCR series ■ Vacuum shut-off valve equipped MCV/MCVS series ■ SEMI standard compliant valve built-in type MCE/MCES series ■ Dual valve MCD/MCRD series ■ Pressure gauge/pressure controller P/PC/PC3/PCD/PCR series ■ Intrinsically safe explosion-proof pressure gauge/pressure controller IS-Pro series ■ Thermal mass flow meter compact mass flow controller BASIS series ■ High-precision flow control for bioreactors BIO series ■ Coriolis high-pressure low-flow high-precision flow controller CODA series