ALICAT's mass flow controller with MCV/MCVS series (equipped with a vacuum shut-off valve).
The "MCV/MCVS series" is a mass flow controller manufactured by ALICAT, equipped with a shut-off valve for vacuum applications. It achieves a fast response through a laminar flow method (differential pressure type). It is equipped with a highly accurate differential pressure sensor to measure flow rates precisely. 【Features】 ■ 100ms control response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Available from 10 SCCM to 20 SLPM ■ Standard analog output and RS 232C communication ■ Compatible with mixed gases ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.
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【Lineup】 ■ MC/MCP/MCR Series (Standard Type) ■ MCS/MCRS Series (Corrosive Gas/Refrigerant Gas Compatible) ■ MCW/MCRW Series (Low Pressure Loss Type) ■ MCQ/MCRW Series (High Pressure Type) ■ MCE/MCES Series (SEMI Standard) ■ MCV/MCVS Series (Equipped with Shut-off Valve) ■ MCD/MCRD Series (Dual Valve) *For more details, please refer to the PDF materials or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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