Features of "DSMC-Neutrals"!
Our self-developed software for three-dimensional rarefied gas analysis, 'DSMC-Neutrals', enables simulation of gas behavior in a vacuum. ■ Rarefied fluid simulation using the particle method ■ Usable for experiments and equipment development using vacuum chambers ■ Capable of simulating film deposition rates and distributions that include chemical reactions like CVD ■ Utilizes unstructured meshes, allowing direct use of actual equipment shapes ■ High parallel efficiency enables quick computation results even for large-scale shapes ■ Since it employs the particle method, it guarantees convergence solutions even with poor-quality computational grids, unlike fluid models ■ We provide comprehensive support both during the trial period and after implementation For more details, please contact us!
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【Calculable Cases (Excerpt)】 ■ Showerhead-type thermal CVD (Chemical Vapor Deposition) ■ Vacuum deposition ■ Molecular Beam Epitaxy (MBE) ■ Exhaust of vacuum pumps ■ Dust behavior simulation ■ Hypersonic rarefied flow
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