Super cleanroom compatible high-precision 6-axis robot
Robots required for semiconductor applications, which necessitate a delicate process, must not only be suitable for super cleanroom environments but also possess high reliability and precision to achieve high productivity. The TX2 SCR series has a proven track record in carrier transport and wafer and mask processes in super cleanrooms.
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basic information
TX2 SCR Series Reach Range: 670 to 2010 mm Payload: 3.7 kg to 40 kg Cleanliness: ISO Class 2
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Applications/Examples of results
Carrier transport Mask inspection Mask attachment Wafer inspection
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Company information
Stäubli has four business divisions: electrical connectors, fluid connectors, industrial robots, and textile machinery. Based on our exceptional expertise and years of accumulated know-how, we provide mechatronics solutions to various industrial sectors. Founded in 1892 as a small textile machinery repair shop near Zurich, Switzerland, Stäubli has grown into a global company operating in 28 countries and having sales partners/agents in 50 countries across four continents. In 1983, Stäubli Corporation was established in Osaka as a unit for business in Japan. We have a showroom in Nishi-Tenma (Osaka), so please feel free to visit us (by appointment only).