sCT9002 Silicon Photonics Wafer Test System
Silicon Photonics (SiPh) Wafer Test System
A smart test system optimized for mass production screening of silicon photonics.
The Semight sCT9002 is a SiPh wafer testing system that is optimized and integrated in both hardware and software, achieving significant improvements in optical alignment performance and coupling speed. This system adopts a modular structure and supports optical coupling using single-core fibers or fiber arrays. It supports both vertical coupling and edge coupling methods, significantly reducing measurement time through parallel testing configurations and dramatically improving testing efficiency. The high precision and high reliability of the sCT9002's measurement performance provide assured data quality and reproducibility in the research and development as well as mass production verification of silicon photonics wafers.
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basic information
▶ Automatic and Semi-Automatic Support Supports automatic/semi-automatic transport of 12-inch and 8-inch wafers. Wafer thickness: 200μm to 2000μm. ▶ Edge Coupling Real-time monitoring of height with a nano-displacement sensor to reduce the risk of fiber damage. Small angle errors are corrected with a high-precision vision system. ▶ Vertical Coupling Automates vertical alignment with the grating coupler. Supports spiral and inclined scanning (coupling time < 2 seconds). ▶ Automatic Fiber Calibration Equipped with a script that allows for automatic calibration of the angle and position of the fiber array within 3 minutes. ▶ Modular Platform Software Supports continuous measurement of Notch Up/Down, reducing time without the need for reloading. Compatible with various SiPh test items such as O/O, E/E, and O/E. ▶ In-house Developed SMU Equipped with a highly integrated 12-channel card-type SMU (±10V, 50mA) that covers the measurement requirements for Si photonic light sources. ▶ Height Sensor Equipped Corrects the flatness variation of wafers on the chuck, enabling stable measurements. ▶ Test Temperature Range Supports a temperature range from room temperature to 150°C (other temperature conditions can also be customized).
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Applications/Examples of results
Evaluation and implementation are already underway with top-class companies in the industry, and they are actively adopting our solutions.
Detailed information
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■ System Architecture The sCT9002 SiPh wafer test system is equipped with an automatic wafer transport mechanism, allowing the transported wafers to be rotated and positioned on the stage. It also supports adjustments to the measurement temperature according to testing requirements. With an active optical alignment system and electrical probes, it couples/connects optical and electrical signals to each measurement device with high precision, automatically executing a series of wafer test processes.
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■ Automatic Wafer Handling With the sCT9002, you can choose between fully automatic mode and semi-automatic mode. The semi-automatic mode is mainly suitable for verification purposes in laboratories and prototype stages, allowing for flexible operation while keeping capital investment low. On the other hand, the fully automatic mode supports high throughput testing in mass production lines, significantly improving production efficiency.
Line up（2）
| Model number | overview |
|---|---|
| sCT9001 | Supports 8-inch and 6-inch wafers ▶ Wafer thickness: 200μm to 1500μm Supports edge coupling and grating coupling Supports spiral coupling and gradient coupling (coupling time < 2 seconds) |
| sCT9002 | 12-inch SiPh wafer test system sCT9002 ▶ Supports 12-inch and 8-inch wafers Wafer thickness: 200μm to 2000μm Supports edge coupling and grating coupling Supports spiral coupling and gradient coupling (coupling time < 2 seconds) |
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Company information
We are a global supplier of advanced testing and measurement equipment. We provide high-performance and highly integrated measurement solutions that can support everything from research and development to mass production processes in cutting-edge fields such as high-speed communication, optical chips, electronic measurement, and power semiconductors. Since our founding, we have placed "Dedication and Craftsmanship" at the core of our corporate values, pursuing product development that combines deep insights into measurement principles with a spirit of craftsmanship. Aiming to be "the best testing solution company supporting global technological innovation," we will continue to provide high-performance, high-efficiency, and highly reliable solutions to address global industrial challenges.