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  6. Free Analysis Seminar | Smart CHART

Free Analysis Seminar | Smart CHART

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last updated:Jul 18, 2025

受託分析|ユーロフィンEAG
受託分析|ユーロフィンEAG
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Free basic analysis seminar held! Please make use of it to enhance your company's analysis skills.

Smart CHART is a chart designed by EAG that clearly shows the relationship between various surface analysis methods, their analysis areas, and detection limits at a glance. It provides an overview of surface analysis techniques, making it useful as a reference when wanting to know about different methods or when selecting an analysis technique. ● Free Basic Analysis Seminar We are offering a free online basic analysis seminar based on the analysis methods available in Smart CHART. In the basic analysis seminar, we will clearly explain the principles and characteristics of each analysis method, as well as the analysis results obtained from each technique. Additionally, we also offer free application seminars for analysis methods such as TEM/STEM (Transmission Electron Microscopy), SIMS (Secondary Ion Mass Spectrometry), and PCOR-SIMS (Point by point Corrected Secondary Ion Mass Spectrometry). The seminars are arranged individually for each customer. Please feel free to contact us if you wish to hold a seminar.

    Contract AnalysisContract measurementContract Inspection
Thumbnail_M-007016

Free Analysis Seminar | Smart CHART

Thumbnail_M-007016 Periodic Table v10_SmartCHART_250624.jpg
Thumbnail_M-007016 Periodic Table v10_SmartCHART_250624.jpg
  • Related Link - https://www.eurofins.co.jp/eag/smart-chart/

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● About the vertical and horizontal axes of the chart The vertical axis represents concentration (right is atomic %, left is atoms/cm³), with lower values indicating higher sensitivity. SIMS, GDMS, and ICP-MS/MS are analytical methods with low detection limits. The horizontal axis represents the analysis area based on beam diameter, with smaller diameters allowing for analysis of smaller regions. TEM/STEM excels in analyzing the smallest regions. ● Methods outside the vertical axis range Methods such as TEM/STEM and SEM, which fall outside the vertical axis range, are morphological observation techniques that cannot directly measure concentration. However, by adding EDS, concentration information can be obtained and represented within the vertical axis. GDMS, located outside the right side of the horizontal axis, has a wide analysis area and can analyze samples such as 1 cm in diameter or powdered samples. ● Physical limit line The physical limit line in the diagram indicates that as the analysis volume decreases, the number of detected atoms decreases, leading to a deterioration in the detection limit (physical limit concentration). For example, at a size of 10 nm by 3 nm deep, there are about 10,000 atoms, so detecting 1 atom results in a physical limit of 100 ppm. ● Colors indicated in the chart The color coding in the chart shows that red represents chemical bonds and molecules, blue represents elements, and green indicates methods for obtaining image information. The yellow-brown XRR can simultaneously acquire film thickness and density, and RBS can provide density if the film thickness is known.

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- I want to know the basics of material analysis. - Utilization for the selection of material analysis.

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Material Analysis Quick Reference Chart | Smart CHART

Material Analysis Quick Reference Chart | Smart CHART

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受託分析|ユーロフィンEAG

受託分析|ユーロフィンEAG

Testing, Analysis and Measurement

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If you are having trouble with material analysis, please feel free to consult EAG! ● High-quality analysis ● Short delivery time ● Quick response Eurofins EAG (abbreviated as EAG) has been providing material analysis services for over 40 years in the semiconductor industry, high-purity metals, and advanced/nano materials fields. We respond to customer needs with our long-standing technical expertise and quick delivery in SIMS analysis (Secondary Ion Mass Spectrometry), which is essential for process development, research and development, and quality assurance of semiconductor devices and manufacturing equipment, as well as TEM/STEM analysis (Transmission Electron Microscopy) and GDMS analysis (Glow Discharge Mass Spectrometry) used for impurity analysis of high-purity materials.

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