Free Analysis Seminar | Smart CHART

basic information

● About the vertical and horizontal axes of the chart The vertical axis represents concentration (right is atomic %, left is atoms/cm³), with lower values indicating higher sensitivity. SIMS, GDMS, and ICP-MS/MS are analytical methods with low detection limits. The horizontal axis represents the analysis area based on beam diameter, with smaller diameters allowing for analysis of smaller regions. TEM/STEM excels in analyzing the smallest regions. ● Methods outside the vertical axis range Methods such as TEM/STEM and SEM, which fall outside the vertical axis range, are morphological observation techniques that cannot directly measure concentration. However, by adding EDS, concentration information can be obtained and represented within the vertical axis. GDMS, located outside the right side of the horizontal axis, has a wide analysis area and can analyze samples such as 1 cm in diameter or powdered samples. ● Physical limit line The physical limit line in the diagram indicates that as the analysis volume decreases, the number of detected atoms decreases, leading to a deterioration in the detection limit (physical limit concentration). For example, at a size of 10 nm by 3 nm deep, there are about 10,000 atoms, so detecting 1 atom results in a physical limit of 100 ppm. ● Colors indicated in the chart The color coding in the chart shows that red represents chemical bonds and molecules, blue represents elements, and green indicates methods for obtaining image information. The yellow-brown XRR can simultaneously acquire film thickness and density, and RBS can provide density if the film thickness is known.

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Applications/Examples of results

- I want to know the basics of material analysis. - Utilization for the selection of material analysis.